. "Je pops\u00E1na modifikace polovodi\u010Dov\u00FDch materi\u00E1l\u016F Si a SiO2 pomoc\u00ED proudu iont\u016F Ge generovan\u00FDch laserem. Ge ionty byly generov\u00E1ny pomoc\u00ED r\u016Fzn\u00FDch laser\u016F a r\u016Fzn\u00E9 iontov\u00E9 diagnostiky byly pou\u017Eity k optimalizaci procesu."@cs . . "The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process" . "160" . "Wolowski, J." . . "Torrisi, L." . "13"^^ . . . . . "6"^^ . . "[41ED4E34E106]" . "Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials"@en . . "Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials" . "Ullschmied, Ji\u0159\u00ED" . "1042-0150" . . "Charakteristiky proudu laserem produkovan\u00FDch Ge iont\u016F u\u017E\u00EDvan\u00FDch pro modifikaci polovodi\u010Dov\u00FDch materi\u00E1l\u016F"@cs . "P(IAA1010405), P(LC528), Z(AV0Z10100523)" . . "Mezzasalma, A." . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . . "Parys, P." . "Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials"@en . "Rosinski, M." . . "Radiation Effects and Defects in Solids" . . "Rohlena, Karel" . "Charakteristiky proudu laserem produkovan\u00FDch Ge iont\u016F u\u017E\u00EDvan\u00FDch pro modifikaci polovodi\u010Dov\u00FDch materi\u00E1l\u016F"@cs . "RIV/68378271:_____/05:00032108!RIV06-AV0-68378271" . "L\u00E1ska, Leo\u0161" . "Characteristics of laser-produced Ge ion streams used for modification of semiconductor materials" . "Kr\u00E1sa, Josef" . "477;482" . "laser ablation; ion implantation; Ge implant in Si"@en . "Badziak, J." . "Boody, F. P." . "3"^^ . . . . . "Gammino, S." . "10-12" . . "The modification of semiconductors materials as Si and SiO2 by laser-generated Ge ion streams is described. Ge ions were produced by different lasers, and various ion diagnostics were used to optimize the process"@en . . "Czarnecka, A." . "RIV/68378271:_____/05:00032108" . "514993" .