"Optical and structural properties of microcrystalline silicon grown by microwave PECVD"@en . . . "3-936338-19-1" . "RIV/68378271:_____/05:00030765" . . "Biebericher, A. C." . "8"^^ . "4"^^ . "Optick\u00E9 a strukturn\u00ED vlastnosti mikrokrystalick\u00E9ho k\u0159em\u00EDku p\u011Bstovan\u00E9ho mikrovlnou PECVD"@cs . "1604;1607" . "Burgers, A. R." . "Barcelona" . "Optical and structural properties of microcrystalline silicon grown by microwave PECVD"@en . "Munich" . . . "RIV/68378271:_____/05:00030765!RIV06-AV0-68378271" . . "WIP-Renewable Energies" . . . "3"^^ . . "Optical and structural properties of microcrystalline silicon grown by microwave PECVD" . "Proceedings of the 20th European Photovoltaic Solar Energy Conference" . "micro crystalline Si; PECVD; optical properties"@en . "Van\u011B\u010Dek, Milan" . "We inwestigated the deposition and material properties of ?c-Si by microwave PECVD."@en . . "534682" . . . . "Zkoumali jsme depozici a materi\u00E1lov\u00E9 vlastnosti mikrokrystalick\u00E9ho k\u0159em\u00EDku."@cs . "We inwestigated the deposition and material properties of ?c-Si by microwave PECVD." . "Z(AV0Z10100521)" . . "Devilee, C." . . . "2005-06-06+02:00"^^ . "Muffler, H. J." . "Ho\u010F\u00E1kov\u00E1, Lenka" . "Soppe, W. J." . "[1920CD5DF63F]" . "Optical and structural properties of microcrystalline silicon grown by microwave PECVD" . "Optick\u00E9 a strukturn\u00ED vlastnosti mikrokrystalick\u00E9ho k\u0159em\u00EDku p\u011Bstovan\u00E9ho mikrovlnou PECVD"@cs . . "Poruba, Ale\u0161" . .