"0040-6090" . . "6"^^ . "Effect of hydrogen passivation on polycrystalline silicon thin films" . "Effect of hydrogen passivation on polycrystalline silicon thin films"@en . "We have observed that remote plasma hydrogenation with duration up to 30 min. effectively passivated the defects and improved the Hall mobility, trap density and hydrogenation not only pasivated defects but also created new defects in the grain" . . . . . "487" . . . "Oswald, Ji\u0159\u00ED" . "[3CC03117C439]" . . . "Effect of hydrogen passivation on polycrystalline silicon thin films" . . "Ko\u010Dka, Jan" . . . "519325" . . "Uraoka, Y." . . "Fuyuki, T." . . . "Yamazaki, T." . . . "Thin Solid Films" . "Efekt pasivace vod\u00EDkem na polykrystalick\u00E9 k\u0159em\u00EDkov\u00E9 tenk\u00E9 vrstvy"@cs . . "RIV/68378271:_____/05:00028425!RIV06-AV0-68378271" . "Effect of hydrogen passivation on polycrystalline silicon thin films"@en . "Honda, Shinya" . . . . "Efekt pasivace vod\u00EDkem na polykrystalick\u00E9 k\u0159em\u00EDkov\u00E9 tenk\u00E9 vrstvy"@cs . "hydrogen passivation; polycrystalline silicon; photoluminescence; Raman spectroscopy; Si-H2; hydrogen molecules"@en . . "Honda, Shinya" . "Mates, Tom\u00E1\u0161" . "Ledinsk\u00FD, Martin" . "-" . "Fejfar, Anton\u00EDn" . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . "5"^^ . "P(GD202/05/H003), P(IAA1010316), P(IAA1010413), Z(AV0Z10100521)" . . "9"^^ . . "RIV/68378271:_____/05:00028425" . "152;156" . "We have observed that remote plasma hydrogenation with duration up to 30 min. effectively passivated the defects and improved the Hall mobility, trap density and hydrogenation not only pasivated defects but also created new defects in the grain"@en . . "Pozorovali jsme, \u017Ee hydrogenace vod\u00EDkov\u00FDm plazmatem po dobu 30 min efektivn\u011B pasivovala defekty a zlep\u0161ila Hallovou pohyblivost, hustotu z\u00E1chytu n\u00E1boje a intenzitu fotoluminescence. Zd\u00E1 se, \u017Ee nadm\u011Brn\u00E1 hydrogenace nejen pasivovala defekty, ale tak\u00E9 vytvo\u0159ila nov\u00E9 uvnit\u0159 zrn"@cs .