. . . . "Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma." . . "The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa."@en . "Mi\u0161ina, Martin" . "The microwave electron cyclotron resonance/r.f. discharge in methane/argon working gas has been studied by a means of energy resolved ion mass spectrometry.The ion energy distribution and composition of the ion flux at a substrate was measured for microwave power ranging from 50 to 600 W, r.f. biases from 0 to -200 V and total pressure from 0.05 to 1 Pa." . . "605941" . . "4"^^ . . "N/A" . "mass spectrometry; ion energy; methane; PE CVD"@en . "Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma." . "0257-8972" . . . "Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma."@en . "RIV/68378271:_____/03:02030256!RIV/2004/AV0/A02004/N" . . "173-174" . . "2"^^ . "0"^^ . "914;917" . . "2"^^ . "Pokorn\u00FD, Petr" . "0"^^ . . . . . "RIV/68378271:_____/03:02030256" . . "Surface and Coating Technology" . . "Energy and composition of the ion flux in microwave electron cyclotron resonance/radio frequency methan plasma."@en . "P(GA106/99/D086), P(ME 455), Z(AV0Z1010914)" . . "[34499ADFBAD1]" . "NL - Nizozemsko" .