. . . "RIV/68378271:_____/03:00100037!RIV/2005/AV0/A02005/N" . "4"^^ . . . . . . "Fejfar, Anton\u00EDn" . . . "629496" . "Study of influence of film thickness, silane concentration and substrate temperature on structure and electrical properties of thin microcrystalline siliconfilms by PECVD is presented."@en . "53" . "CZ - \u010Cesk\u00E1 republika" . . . . "Fojt\u00EDk, Petr" . . . "Studium struktury a r\u016Fstu nizkoteplotn\u00EDho protokrystalick\u00E9ho k\u0159em\u00EDku pomoc\u00ED AFM mikroskopu" . "0009-0700" . . "Mates, Tom\u00E1\u0161" . "8"^^ . "Influence of film thickness, silane concentration and substrate temperature on structure and electrical properties of thin film protocrystalline silicon"@en . . "Studium vlivu tlou\u0161tky vrstvy, koncentrace silanu a teploty substr\u00E1tu na strukturu a elektrick\u00E9 vlastnosti tenk\u00FDch vrstev mikrokrystalick\u00E9ho k\u0159em\u00EDku, p\u0159ipraven\u00E9ho pomoc\u00ED PECVD." . "Luterov\u00E1, Kate\u0159ina" . "-" . "Studium struktury a r\u016Fstu nizkoteplotn\u00EDho protokrystalick\u00E9ho k\u0159em\u00EDku pomoc\u00ED AFM mikroskopu"@cs . "\u010Ceskoslovensk\u00FD \u010Dasopis pro fyziku" . "8"^^ . . . "Rezek, Bohuslav" . "Drbohlav, Ivo" . "Studium struktury a r\u016Fstu nizkoteplotn\u00EDho protokrystalick\u00E9ho k\u0159em\u00EDku pomoc\u00ED AFM mikroskopu" . . "Studium vlivu tlou\u0161tky vrstvy, koncentrace silanu a teploty substr\u00E1tu na strukturu a elektrick\u00E9 vlastnosti tenk\u00FDch vrstev mikrokrystalick\u00E9ho k\u0159em\u00EDku, p\u0159ipraven\u00E9ho pomoc\u00ED PECVD."@cs . . "93;96" . "P(IAA1010809), P(IAB2949101), Z(AV0Z1010914)" . "Ko\u010Dka, Jan" . "Influence of film thickness, silane concentration and substrate temperature on structure and electrical properties of thin film protocrystalline silicon"@en . "PECVD; microcrystalline silicon; AFM"@en . "[01A178266254]" . . . "Studium struktury a r\u016Fstu nizkoteplotn\u00EDho protokrystalick\u00E9ho k\u0159em\u00EDku pomoc\u00ED AFM mikroskopu"@cs . . . "RIV/68378271:_____/03:00100037" . "Pelant, Ivan" .