"Study of plasma in hybrid PLD system for CNx films creation"@en . . "RIV/68378271:_____/02:00104234!RIV/2005/AV0/A02005/N" . "Zelinger, Zden\u011Bk" . . "2"^^ . "4"^^ . . "We have developed hybrid PLD systems (combination of PLD and additional radiofrquency discharges) for increasing active nitrogen concentration in plasma and consequently N/C ratio in deposited films. For study of plasma and plasma processes we have used OES" . . . . . . . . . "Lan\u010Dok, J\u00E1n" . . . "Bul\u00ED\u0159, Ji\u0159\u00ED" . "665741" . "Study of plasma in hybrid PLD system for CNx films creation"@en . "RIV/68378271:_____/02:00104234" . "124;125" . "5"^^ . "Study of plasma in hybrid PLD system for CNx films creation" . "Optick\u00E9 komunikace" . . "P(IAA1010110), Z(AV0Z1010914)" . "2002-10-01+02:00"^^ . "TechMarket, Praha" . "CN x films; hybrid PLD system"@en . . . "Study of plasma in hybrid PLD system for CNx films creation" . "Praha" . . "Praha" . . "We have developed hybrid PLD systems (combination of PLD and additional radiofrquency discharges) for increasing active nitrogen concentration in plasma and consequently N/C ratio in deposited films. For study of plasma and plasma processes we have used OES"@en . "Studium plasmy v hybridn\u00EDm PLD syst\u00E9mu pro p\u0159\u00EDpravu CNx vrstev"@cs . "Byl vyvinut nov\u00FD hybridn\u00ED PLD syst\u00E9m (kombinace PLD s p\u0159\u00EDdavn\u00FDm radiofrekven\u010Dn\u00FDm v\u00FDbojem) pro zv\u00FD\u0161en\u00ED koncentrace aktivn\u00EDho dus\u00EDku v plasm\u011B a n\u00E1sledn\u011B pom\u011Bru N:C v p\u0159ipraven\u00FDch vrstv\u00E1ch. Pro studium plasmy a proces\u016F v n\u00ED byla pou\u017Eita metoda OES"@cs . . "[8A76FDDEB2F4]" . "Novotn\u00FD, Michal" . "Jel\u00EDnek, Miroslav" . . "Studium plasmy v hybridn\u00EDm PLD syst\u00E9mu pro p\u0159\u00EDpravu CNx vrstev"@cs .