"Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering."@en . . . "Diamond and Related Materials" . "Deineka, Alexander" . . "RIV/68378271:_____/01:02010165" . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . "Deineka, Alexander" . "6"^^ . . "Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering." . . "0"^^ . "Franc, Franti\u0161ek" . "1076;1081" . "0925-9635" . "0"^^ . "Kulikovsky, V." . . . "In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2."@en . . . "Vorl\u00ED\u010Dek, Vladim\u00EDr" . "10" . "diamond-like carbon; - structure; - stress; hardness"@en . "In this paper the authors attempts to find the connection between the hardness, internal stress, resistivity and structure of a-C films obtained ba magnetron sputtering of carbon by varying the Ar pressure, the substrate bias and gas mixtures of Ar+CH4 or Ar+O2." . "681466" . "Jastrab\u00EDk, Lubom\u00EDr" . "P(GA202/00/1592), P(ME 305), Z(AV0Z1010914), Z(MSM 210000021)" . . . . . . . "RIV/68378271:_____/01:02010165!RIV/2003/AV0/A02003/N" . "Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering."@en . "6"^^ . "Boh\u00E1\u010D, Petr" . "N/A" . . . "Hardness, intrinsic stress, and structure of the a-C and a-C:H films prepared by magnetron sputtering." . . . "5"^^ . . . . "[A422E3352AB9]" . .