. "RIV/68081731:_____/13:00426279" . "Brno" . . . "SMV-2013-29: N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu"@cs . . "N" . . "1"^^ . "N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu st\u0159\u00EDdaj\u00EDc\u00EDho ve dvouvrstv\u00E1ch molybden a k\u0159em\u00EDk vytvo\u0159en\u00E9ho magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm tak, aby drsnost rozhran\u00ED uveden\u00FDch vrstev nep\u0159esahovala 0,2 nanometry a reprodukovatelnost tlou\u0161t\u011Bk dvouvrstev byla lep\u0161\u00ED ne\u017E jedna desetina nanometru pro experimenty v rentgenov\u00E9m laseru PALS. 0,2 nanometry." . . "SMV-2013-29: N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu" . "3"^^ . "RIV/68081731:_____/13:00426279!RIV14-AV0-68081731" . "N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu st\u0159\u00EDdaj\u00EDc\u00EDho ve dvouvrstv\u00E1ch molybden a k\u0159em\u00EDk vytvo\u0159en\u00E9ho magnetronov\u00FDm napra\u0161ov\u00E1n\u00EDm tak, aby drsnost rozhran\u00ED uveden\u00FDch vrstev nep\u0159esahovala 0,2 nanometry a reprodukovatelnost tlou\u0161t\u011Bk dvouvrstev byla lep\u0161\u00ED ne\u017E jedna desetina nanometru pro experimenty v rentgenov\u00E9m laseru PALS. 0,2 nanometry."@cs . "[7557EB0F8B85]" . "SMV-2013-29: N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu"@cs . "SMV-2013-29: Deposition technology and implementation of multilayer system"@en . . . . "We have developed deposition technology and implementation of multilayer system of molybdenum and silicon prepared by magnetron sputtering. Interface roughness has to be smaller than 0.2 nm and reproducibility of bilayer thickness (i.e. molybdenum and silicon) must be better that 0.1nm. This multilayer system was used as a mirror in x-ray laser PALS."@en . . . "105782" . . "EUV mirror; sputtering; molybdenum; silicon"@en . . "SMV-2013-29: Deposition technology and implementation of multilayer system"@en . . "1"^^ . . . "Sobota, Jaroslav" . "SMV-2013-29: N\u00E1vrh technologie p\u0159\u00EDpravy a realizace mnohovrstv\u00E9ho syst\u00E9mu" .