"P\u0159\u00EDsp\u011Bvek popisuje v\u00FDsledky spole\u010Dn\u00E9ho projektu \u00DAPT a firmy Meopta \u2013 optika zam\u011B\u0159en\u00E9ho na v\u00FDvoj interferometrick\u00FDch syst\u00E9m\u016F pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch. Na \u00DAPT AV \u010CR jde o nav\u00E1z\u00E1n\u00ED na v\u00FDsledky v\u00FDzkumu na poli interferometrick\u00E9ho m\u011B\u0159en\u00ED vzd\u00E1lenost\u00ED a laser\u016F s vysokou koherenc\u00ED, stabilizace optick\u00E9 frekvence laser\u016F a laserov\u00E9 metrologie. Jde o v\u00FDzkumn\u00E9 pr\u00E1ce zam\u011B\u0159en\u00E9 na pr\u016Fmyslovou interferometrii a v sou\u010Dinnosti s firmou Meopta - optika, s.r.o. o p\u0159ed\u00E1n\u00ED pot\u0159ebn\u00E9ho know-how pro p\u0159\u00EDpravu v\u00FDroby. N\u00E1pl\u0148 projektu je zam\u011B\u0159en\u00E1 na v\u00FDzkum technologie v\u00FDroby, metodiky interferometrick\u00E9ho m\u011B\u0159en\u00ED, stabilizace frekvence laserov\u00FDch zdroj\u016F z\u00E1\u0159en\u00ED, detek\u010Dn\u00EDch syst\u00E9m\u016F interferen\u010Dn\u00EDho sign\u00E1lu, zpracov\u00E1n\u00ED sign\u00E1l\u016F, v\u0161e s d\u016Frazem na p\u0159esnost a rozli\u0161en\u00ED prim\u00E1rn\u011B pro m\u011B\u0159en\u00ED v nanosv\u011Bt\u011B. C\u00EDlem spole\u010Dn\u00E9ho \u00FAsil\u00ED je komplexn\u00ED interferometrick\u00FD m\u011B\u0159ic\u00ED syst\u00E9m v podob\u011B funk\u010Dn\u00EDho vzoru, kter\u00FD bude slou\u017Eit jako v\u00FDchodisko pro v\u00FDrobu. P\u016Fjde o modul\u00E1rn\u00ED rodinu komponent\u016F konfigurovateln\u00FDch pro r\u016Fzn\u00E9 sestavy vyu\u017Eit\u00ED p\u0159edev\u0161\u00EDm pro v\u00EDceos\u00E9 m\u011B\u0159en\u00ED v nanotechnologi\u00EDch a testov\u00E1n\u00ED povrch\u016F." . . . . "\u00DAstav p\u0159\u00EDstrojov\u00E9 techniky AV \u010CR, v. v. i" . "P\u0159\u00EDsp\u011Bvek popisuje v\u00FDsledky spole\u010Dn\u00E9ho projektu \u00DAPT a firmy Meopta \u2013 optika zam\u011B\u0159en\u00E9ho na v\u00FDvoj interferometrick\u00FDch syst\u00E9m\u016F pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch. Na \u00DAPT AV \u010CR jde o nav\u00E1z\u00E1n\u00ED na v\u00FDsledky v\u00FDzkumu na poli interferometrick\u00E9ho m\u011B\u0159en\u00ED vzd\u00E1lenost\u00ED a laser\u016F s vysokou koherenc\u00ED, stabilizace optick\u00E9 frekvence laser\u016F a laserov\u00E9 metrologie. Jde o v\u00FDzkumn\u00E9 pr\u00E1ce zam\u011B\u0159en\u00E9 na pr\u016Fmyslovou interferometrii a v sou\u010Dinnosti s firmou Meopta - optika, s.r.o. o p\u0159ed\u00E1n\u00ED pot\u0159ebn\u00E9ho know-how pro p\u0159\u00EDpravu v\u00FDroby. N\u00E1pl\u0148 projektu je zam\u011B\u0159en\u00E1 na v\u00FDzkum technologie v\u00FDroby, metodiky interferometrick\u00E9ho m\u011B\u0159en\u00ED, stabilizace frekvence laserov\u00FDch zdroj\u016F z\u00E1\u0159en\u00ED, detek\u010Dn\u00EDch syst\u00E9m\u016F interferen\u010Dn\u00EDho sign\u00E1lu, zpracov\u00E1n\u00ED sign\u00E1l\u016F, v\u0161e s d\u016Frazem na p\u0159esnost a rozli\u0161en\u00ED prim\u00E1rn\u011B pro m\u011B\u0159en\u00ED v nanosv\u011Bt\u011B. C\u00EDlem spole\u010Dn\u00E9ho \u00FAsil\u00ED je komplexn\u00ED interferometrick\u00FD m\u011B\u0159ic\u00ED syst\u00E9m v podob\u011B funk\u010Dn\u00EDho vzoru, kter\u00FD bude slou\u017Eit jako v\u00FDchodisko pro v\u00FDrobu. P\u016Fjde o modul\u00E1rn\u00ED rodinu komponent\u016F konfigurovateln\u00FDch pro r\u016Fzn\u00E9 sestavy vyu\u017Eit\u00ED p\u0159edev\u0161\u00EDm pro v\u00EDceos\u00E9 m\u011B\u0159en\u00ED v nanotechnologi\u00EDch a testov\u00E1n\u00ED povrch\u016F."@cs . . . "Vychodil, M." . "978-80-87441-10-7" . "Hol\u00E1, Miroslava" . . . "We present a development of a nanometrology system combining local probe microscopy and precise positioning and measuring in the nanoscale. The positioning operates in short range with a focus on precision; displacement measurement controls the sample stage in six degrees of freedom with high-resolution interferometry. The system is designed to operate as a national standard for nanometrology. The contribution presents collaborative work with Meopta company."@en . . "T\u0159e\u0161\u0165" . . "Pokro\u010Dil\u00E9 interferometrick\u00E9 syst\u00E9my pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch" . "[96085E757A8B]" . "I, P(ED0017/01/01), P(TA02010711), P(TE01020233)" . . . "Brno" . . "Sborn\u00EDk p\u0159\u00EDsp\u011Bvk\u016F multioborov\u00E9 konference LASER53" . . . "RIV/68081731:_____/13:00421265!RIV14-TA0-68081731" . "RIV/68081731:_____/13:00421265" . "Pokro\u010Dil\u00E9 interferometrick\u00E9 syst\u00E9my pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch"@cs . "2"^^ . "Advanced Laser Measuring Systems in Nanometrology"@en . "Pokro\u010Dil\u00E9 interferometrick\u00E9 syst\u00E9my pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch" . "Hrabina, Jan" . "Pokro\u010Dil\u00E9 interferometrick\u00E9 syst\u00E9my pro m\u011B\u0159en\u00ED v nanotechnologi\u00EDch"@cs . . . "interferometry; nanometrology; positioning; dimensional metrology"@en . "4"^^ . "2013-10-30+01:00"^^ . . . "Lazar, Josef" . . . "Advanced Laser Measuring Systems in Nanometrology"@en . "96884" . . "3"^^ . . .