"Multidimensional interferometric measuremenr system for AFM microscopy - national standard for nanometrology"@en . "1"^^ . . . "1"^^ . "Hrabina, Jan" . "[B7B5E1262AFD]" . . . "Multidimension\u00E1ln\u00ED interferometrick\u00FD odm\u011B\u0159ovac\u00ED syst\u00E9m pro AFM mikroskopii - n\u00E1rodn\u00ED etalon pro nanometrologii"@cs . . "RIV/68081731:_____/13:00421263" . . . . "Multidimension\u00E1ln\u00ED interferometrick\u00FD odm\u011B\u0159ovac\u00ED syst\u00E9m pro AFM mikroskopii - n\u00E1rodn\u00ED etalon pro nanometrologii" . . "I, P(ED0017/01/01), P(EE2.4.31.0016), P(GPP102/11/P820), P(TA02010711), P(TE01020233)" . "P\u0159\u00EDsp\u011Bvek prezentuje v\u00FDsledky v\u00FDzkumu na interferometrick\u00E9m odm\u011B\u0159ovac\u00EDm 6-os\u00E9m syst\u00E9mu pro mikroskopii s lok\u00E1ln\u00ED sondou. Za\u0159\u00EDzen\u00ED bylo vyv\u00EDjeno ve spolupr\u00E1ci s \u010Cesk\u00FDm metrologick\u00FDm institutem v Brn\u011B a je v sestav\u011B s AFM mikroskopem (mikroskop atom\u00E1rn\u00EDch sil) ur\u010Deno k provozu jako n\u00E1rodn\u00ED nanometrologick\u00FD etalon. Syst\u00E9m sest\u00E1v\u00E1 z komer\u010Dn\u00EDho nanopolohovac\u00EDho stolku \u0159\u00EDzen\u00E9ho piezoelektrick\u00FDmi aktu\u00E1tory s mo\u017Enost\u00ED polohov\u00E1n\u00ED, metrologick\u00E9ho r\u00E1mu a laserem nap\u00E1jen\u00E9 interferometrick\u00E9 sestavy pro odm\u011B\u0159ov\u00E1n\u00ED polohy ve v\u0161ech \u0161esti os\u00E1ch volnosti." . "Multidimension\u00E1ln\u00ED interferometrick\u00FD odm\u011B\u0159ovac\u00ED syst\u00E9m pro AFM mikroskopii - n\u00E1rodn\u00ED etalon pro nanometrologii"@cs . "We present the design and performance characteristics of 6-axis interferometric measurement system for local probe microscopy. Described measurement tool was developed in colaboration with the Czech Metrological Institute in Brno and it is intended to solve as a national nanometrological standard. The system in based on a commercial nanopositioning sample table controlled by piezoelectric transducers, a metrological frame and a laser interferometric setup for dimensional measurements in six degrees of freedom."@en . "Brno" . . . "Multidimension\u00E1ln\u00ED interferometrick\u00FD odm\u011B\u0159ovac\u00ED syst\u00E9m pro AFM mikroskopii - n\u00E1rodn\u00ED etalon pro nanometrologii" . "90028" . "Sborn\u00EDk p\u0159\u00EDsp\u011Bvk\u016F multioborov\u00E9 konference LASER53" . . . "RIV/68081731:_____/13:00421263!RIV14-TA0-68081731" . "2013-10-30+01:00"^^ . "interferometry; nanometrology; AFM"@en . . . . "2"^^ . . . . "978-80-87441-10-7" . "Multidimensional interferometric measuremenr system for AFM microscopy - national standard for nanometrology"@en . . "P\u0159\u00EDsp\u011Bvek prezentuje v\u00FDsledky v\u00FDzkumu na interferometrick\u00E9m odm\u011B\u0159ovac\u00EDm 6-os\u00E9m syst\u00E9mu pro mikroskopii s lok\u00E1ln\u00ED sondou. Za\u0159\u00EDzen\u00ED bylo vyv\u00EDjeno ve spolupr\u00E1ci s \u010Cesk\u00FDm metrologick\u00FDm institutem v Brn\u011B a je v sestav\u011B s AFM mikroskopem (mikroskop atom\u00E1rn\u00EDch sil) ur\u010Deno k provozu jako n\u00E1rodn\u00ED nanometrologick\u00FD etalon. Syst\u00E9m sest\u00E1v\u00E1 z komer\u010Dn\u00EDho nanopolohovac\u00EDho stolku \u0159\u00EDzen\u00E9ho piezoelektrick\u00FDmi aktu\u00E1tory s mo\u017Enost\u00ED polohov\u00E1n\u00ED, metrologick\u00E9ho r\u00E1mu a laserem nap\u00E1jen\u00E9 interferometrick\u00E9 sestavy pro odm\u011B\u0159ov\u00E1n\u00ED polohy ve v\u0161ech \u0161esti os\u00E1ch volnosti."@cs . . "\u00DAstav p\u0159\u00EDstrojov\u00E9 techniky AV \u010CR, v. v. i" . . "T\u0159e\u0161\u0165" .