. . "We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length."@en . . "RIV/68081731:_____/13:00397860" . . "Interferometric coordinates measurement sytem for local probe microscopy nanometrology" . "6"^^ . . . . . "Interferometric coordinates measurement sytem for local probe microscopy nanometrology"@en . "Hol\u00E1, Miroslava" . "We present an overview of new approaches to the design of nanometrology measuring system with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning setup with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro- and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length." . . "6"^^ . "Lazar, Josef" . . "RIV/68081731:_____/13:00397860!RIV14-TA0-68081731" . . . "Klepetek, P." . "978-80-87294-44-4" . "Nanometrology; Interferometry; Traceability; Local probe microscopy; Nanopositioning"@en . . . . . . . "I, P(ED0017/01/01), P(EE2.4.31.0016), P(FR-TI2/705), P(GPP102/11/P820), P(TA01010995), P(TA02010711), P(TE01020233)" . "Interferometric coordinates measurement sytem for local probe microscopy nanometrology" . "\u010C\u00ED\u017Eek, Martin" . . "Hrabina, Jan" . "Brno" . "\u0160er\u00FD, Mojm\u00EDr" . . . . . . . "NANOCON 2013. 5th International Conference Proceedings" . . "80736" . . "2013-10-16+02:00"^^ . . . "\u010C\u00EDp, Ond\u0159ej" . . "7"^^ . "Ostrava" . "[FE914B25E0A6]" . . "TANGER Ltd" . "Interferometric coordinates measurement sytem for local probe microscopy nanometrology"@en .