. . . . "5"^^ . "10.1116/1.4802920" . "In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern." . . "Modified knife-edge method for current density distribution measurements in e-beam writers"@en . "31" . "Modified knife-edge method for current density distribution measurements in e-beam writers"@en . "5"^^ . "3" . "Kola\u0159\u00EDk, Vladim\u00EDr" . "RIV/68081731:_____/13:00397634!RIV14-TA0-68081731" . . "Modified knife-edge method for current density distribution measurements in e-beam writers" . "[C1296A28A640]" . "6"^^ . "89177" . . . "Hor\u00E1\u010Dek, Miroslav" . . . "000320130500054" . . "I, P(ED0017/01/01), P(TE01020118)" . . . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "electron-beam; intensity distribution; aperture; detector; profile; size"@en . "Modified knife-edge method for current density distribution measurements in e-beam writers" . . "Bok, Jan" . . . . "RIV/68081731:_____/13:00397634" . "Mat\u011Bjka, Franti\u0161ek" . . . . . . . "Mat\u011Bjka, Milan" . "In this paper, the authors present a modified knife-edge method for two-dimensional current density mapping in electron-beam writing systems. This method is applicable in rectangular and in variable-shaped e-beam writers with a fixed mutual position of the e-beam and the 1st shutter during exposure. In contrast to other methods, the modified knife-edge method uses only native parts of the e-beam writer, giving it the advantage of easy implementation. The measurement error of our method is analyzed and the trade-off between the result accuracy, the current density resolution and the measurement duration is discussed. The presented method is demonstrated by adjusting an electron emitter in order to select a homogeneous e-beam pattern."@en . . . "Journal of Vacuum Science & Technology B" . "1071-1023" .