"[21E625B77E5D]" . "P(ED0017/01/01), P(FR-TI1/576), Z(AV0Z20650511)" . "0447-6441" . "RIV/68081731:_____/11:00370933" . . "The paper describes the results achieved by electron beam lithography when using an electron beam writer BS 600. The impacts of interference that are common in industrial areas are discussed. Electromagnetic field in the critical place i.e. along an electron beam axis is considered to be the predominant source of disturbances. An installation of a magnetic field cancelling system is described. The best resolution achievable in both cases (the magnetic field cancelling system being on or off) are presented. It is supposed that the results and experience described herein would be helpful when new laboratories and operations for nanotechnologies will be designed and built."@en . . . . "Kola\u0159\u00EDk, Vladim\u00EDr" . . . . "Mat\u011Bjka, Franti\u0161ek" . . "P\u0159\u00EDsp\u011Bvek se zab\u00FDv\u00E1 v\u00FDsledky dosa\u017Een\u00FDmi p\u0159i litografick\u00FDch operac\u00EDch s vyu\u017Eit\u00EDm elektronov\u00E9ho litografu BS 600. \u010Cl\u00E1nek diskutuje zejm\u00E9na vliv ru\u0161en\u00ED v b\u011B\u017En\u00E9m pr\u016Fmyslov\u00E9m prost\u0159ed\u00ED na parametry dosa\u017Eiteln\u00E9 p\u0159i tomto zp\u016Fsobu litografie. Za p\u0159eva\u017Euj\u00EDc\u00ED ru\u0161iv\u00FD projev je pova\u017Eov\u00E1no prom\u011Bnliv\u00E9 elektromagnetick\u00E9 pole v kritick\u00E9 oblasti, tedy pod\u00E9l osy elektronov\u00E9ho svazku zapisovac\u00EDho za\u0159\u00EDzen\u00ED. Prezentov\u00E1ny jsou mezn\u00ED parametry realizovan\u00FDch struktur ve dvou p\u0159\u00EDpadech, jednak p\u0159i dosavadn\u00EDm b\u011B\u017En\u00E9m uspo\u0159\u00E1d\u00E1n\u00ED a jednak p\u0159i vyu\u017Eit\u00ED syst\u00E9mu pro aktivn\u00ED kompenzaci magnetick\u00E9ho pole. Auto\u0159i se domn\u00EDvaj\u00ED, \u017Ee zku\u0161enosti a v\u00FDsledky popsan\u00E9 v tomto p\u0159\u00EDsp\u011Bvku mohou v\u00FDznamn\u00FDm zp\u016Fsobem pomoci p\u0159i budov\u00E1n\u00ED v\u011Bdeck\u00FDch i pr\u016Fmyslov\u00FDch laborato\u0159\u00ED \u010Di provoz\u016F se zam\u011B\u0159en\u00EDm na litografii, mikroskopii i technologie obecn\u011B, a to p\u0159i pr\u00E1ci s objekty o rozm\u011Brech pod 100 nanometr\u016F."@cs . "Urb\u00E1nek, Michal" . . "5"^^ . . "P\u0159\u00EDsp\u011Bvek se zab\u00FDv\u00E1 v\u00FDsledky dosa\u017Een\u00FDmi p\u0159i litografick\u00FDch operac\u00EDch s vyu\u017Eit\u00EDm elektronov\u00E9ho litografu BS 600. \u010Cl\u00E1nek diskutuje zejm\u00E9na vliv ru\u0161en\u00ED v b\u011B\u017En\u00E9m pr\u016Fmyslov\u00E9m prost\u0159ed\u00ED na parametry dosa\u017Eiteln\u00E9 p\u0159i tomto zp\u016Fsobu litografie. Za p\u0159eva\u017Euj\u00EDc\u00ED ru\u0161iv\u00FD projev je pova\u017Eov\u00E1no prom\u011Bnliv\u00E9 elektromagnetick\u00E9 pole v kritick\u00E9 oblasti, tedy pod\u00E9l osy elektronov\u00E9ho svazku zapisovac\u00EDho za\u0159\u00EDzen\u00ED. Prezentov\u00E1ny jsou mezn\u00ED parametry realizovan\u00FDch struktur ve dvou p\u0159\u00EDpadech, jednak p\u0159i dosavadn\u00EDm b\u011B\u017En\u00E9m uspo\u0159\u00E1d\u00E1n\u00ED a jednak p\u0159i vyu\u017Eit\u00ED syst\u00E9mu pro aktivn\u00ED kompenzaci magnetick\u00E9ho pole. Auto\u0159i se domn\u00EDvaj\u00ED, \u017Ee zku\u0161enosti a v\u00FDsledky popsan\u00E9 v tomto p\u0159\u00EDsp\u011Bvku mohou v\u00FDznamn\u00FDm zp\u016Fsobem pomoci p\u0159i budov\u00E1n\u00ED v\u011Bdeck\u00FDch i pr\u016Fmyslov\u00FDch laborato\u0159\u00ED \u010Di provoz\u016F se zam\u011B\u0159en\u00EDm na litografii, mikroskopii i technologie obecn\u011B, a to p\u0159i pr\u00E1ci s objekty o rozm\u011Brech pod 100 nanometr\u016F." . . . "Nanolitografie a kompenzace magnetick\u00E9ho pole v prost\u0159ed\u00ED s pr\u016Fmyslov\u00FDm ru\u0161en\u00EDm"@cs . . . . "Nanolithography and Magnetic Field Cancellation in the Industrial Area"@en . "E-beam writer with a shaped beam; magnetic field cancelling system; electron optics column; nanolithography; nanotechnology"@en . "5"^^ . "Nanolitografie a kompenzace magnetick\u00E9ho pole v prost\u0159ed\u00ED s pr\u016Fmyslov\u00FDm ru\u0161en\u00EDm"@cs . "11-12" . "CZ - \u010Cesk\u00E1 republika" . "5"^^ . . . "RIV/68081731:_____/11:00370933!RIV12-MSM-68081731" . . . "56" . "Nanolitografie a kompenzace magnetick\u00E9ho pole v prost\u0159ed\u00ED s pr\u016Fmyslov\u00FDm ru\u0161en\u00EDm" . "214781" . . "Mat\u011Bjka, Milan" . "Jemn\u00E1 mechanika a optika" . . "Hor\u00E1\u010Dek, Miroslav" . . . "Nanolithography and Magnetic Field Cancellation in the Industrial Area"@en . . "Nanolitografie a kompenzace magnetick\u00E9ho pole v prost\u0159ed\u00ED s pr\u016Fmyslov\u00FDm ru\u0161en\u00EDm" . .