. . "Measurement Science and Technology" . "0957-0233" . "RIV/68081731:_____/11:00366031!RIV12-MSM-68081731" . . "RIV/68081731:_____/11:00366031" . "Multidimensional interferometric tool for the local probe microscopy nanometrology"@en . . "Klapetek, P." . . "Hrabina, Jan" . "This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented."@en . "Multidimensional interferometric tool for the local probe microscopy nanometrology" . . . . "atomic force microscopy (AFM); nanometrology; nanopositioning interferometry; nanoscale"@en . . "9" . . . . . "Multidimensional interferometric tool for the local probe microscopy nanometrology"@en . . "214205" . . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . . . "10.1088/0957-0233/22/9/094030" . "Lazar, Josef" . . "Multidimensional interferometric tool for the local probe microscopy nanometrology" . . "P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)" . "3"^^ . "This work reports on the measurement at the nanoscale using local probe microscopy techniques, primarily atomic force microscopy. Recent applications using the atomic force microscope as a nanometrology tool require that not only the positioning of the tip has to be based on precise measurements but also the traceability of the measuring technique has to be ensured up to the primary standard. Thus, in our experimental work, laser interferometric measuring methods were employed. In this paper, a new design of the six-axis-dimensional interferometric measurement tool for local probe microscopy stage nanopositioning is presented." . . "\u010C\u00EDp, Ond\u0159ej" . "4"^^ . . "000294764800031" . "[1B26494C47CB]" . . . "22" . "8"^^ .