"Laser interferometric measuring system for positioning in nanometrology"@en . . "In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology."@en . "5"^^ . "In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology." . "RIV/68081731:_____/10:00351325" . . "\u010C\u00ED\u017Eek, Martin" . "\u010C\u00EDp, Ond\u0159ej" . . . . . "Lazar, Josef" . . "9" . "GR - \u0158eck\u00E1 republika" . "P(FR-TI1/241), P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)" . "10" . "Laser interferometric measuring system for positioning in nanometrology" . . . "RIV/68081731:_____/10:00351325!RIV11-GA0-68081731" . . . . "Laser interferometric measuring system for positioning in nanometrology" . . . . . . . "[1A20FB61DB1B]" . "\u0160er\u00FD, Mojm\u00EDr" . . "5"^^ . . . . "1109-2734" . "267940" . "Hrabina, Jan" . . "10"^^ . "Interferometry; local probe microscopy; nanometrology; nanopositioning; traceability"@en . . . "Laser interferometric measuring system for positioning in nanometrology"@en . . "WSEAS Transactions on Circuits and Systems" .