"Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model"@en . "Trunec, D." . "Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model" . . . "Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model" . . . . "000284942800007" . "11"^^ . "0022-3727" . . . "1"^^ . . "Dvo\u0159\u00E1k, P." . "4"^^ . . "P(GA202/07/1669), P(GA202/09/0800), P(KAN101630651), S, Z(AV0Z20650511), Z(MSM0021622411)" . . . . "Navr\u00E1til, Z." . "Journal of Physics D-Applied Physics" . . . "Determination of electron density and temperature in a capacitively coupled RF discharge in neon by OES complemented with a CR model"@en . . "RIV/68081731:_____/10:00350874!RIV11-GA0-68081731" . . . "electron temperature; electron density; optical emission spectroscopy; collisional\u2013radiative model"@en . . "253741" . "A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional\u2013radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional\u2013radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation." . . . "[CE575229EB7B]" . "A method of determination of electron temperature and electron density in plasmas based on optical emission spectroscopy complemented with collisional\u2013radiative modelling (OES/CRM) was studied in this work. A radiofrequency (13.56 MHz) capacitively coupled discharge in neon at 10 Pa was investigated by intensity calibrated optical emission spectroscopy. The absolute intensities of neon transitions between 3p and 3s states were fitted with a collisional\u2013radiative (CR) model in order to determine the electron temperature and electron density. Measuring techniques such as imaging with an ICCD camera were adopted for supplementary diagnostics. The obtained results were compared with the results of compensated Langmuir probe measurement and one-dimensional article-in-cell/Monte Carlo (PIC/MC) simulation."@en . "43" . "Brzobohat\u00FD, Oto" . "Nov 3" . . "RIV/68081731:_____/10:00350874" . . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" .