"RIV/68081731:_____/09:00335265!RIV10-AV0-68081731" . "The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level." . "Verlag der Technischen Universit\u00E4t" . . "The retarding potential between the specimen and an anode, a cathode lens, is already commonly used for high resolution imaging at very low electron beam energies, even below 10 eV, in a scanning electron microscope (SEM). Standard configuration consists of an electron column (either magnetic or electrostatic), YAG single-crystal scintillator positioned under the objective lens, used as an anode, and an insulated specimen used as a cathode of the cathode lens. The microscope with the cathode lens can be used not only to acquire standard signals as secondary electrons (SE) and backscattered electrons (BSE); transmitted electrons (STEM) and electron beam induced current (EBIC) can be used as well. Two problems are addressed. First, we have to bring a high voltage on the insulated specimen in the microscope chamber, and second, we have to solve the induced current measurement on the high voltage level."@en . . "2009-08-30+02:00"^^ . . . . "978-3-85125-062-6" . . "Electron beam induced current measurement on a specimen biased in a cathode lens" . . "3"^^ . "Electron beam induced current measurement on a specimen biased in a cathode lens"@en . . "[E8D7DFDBE83F]" . "2"^^ . "3"^^ . . "P(IAA100650803), Z(AV0Z20650511)" . "312848" . . "Electron beam induced current measurement on a specimen biased in a cathode lens"@en . "MC 2009 - Microscopy Conference: First Joint Meeting of Dreil\u00E4ndertagung and Multinational Conference on Microscopy" . "Graz" . . "Graz" . . . "Hor\u00E1\u010Dek, Miroslav" . . . "RIV/68081731:_____/09:00335265" . . "Electron beam induced current measurement on a specimen biased in a cathode lens" . . . "elektron beam induced current; SEM; very low energy electrons; cathode lens; specimen bias"@en . "Zoba\u010D, Martin" . . . . . "Vl\u010Dek, Ivan" .