"418372" . "RIV/68081731:_____/07:00092590" . . . "P(GA102/05/2327), Z(AV0Z20650511)" . . "Dynamic Behaviour of the Dopant Contrast in LVSEM" . "Kontrast mezi rozd\u00EDln\u011B dopovan\u00FDmi oblastmi polovodi\u010De m\u016F\u017Ee b\u00FDt pozorov\u00E1n v rastrovac\u00EDm elektronov\u00E9 mikroskopu v sign\u00E1lu sekund\u00E1rn\u00EDch elektron\u016F. Na r\u016Fzn\u011B dopovan\u00FDch vzorc\u00EDch bylo studov\u00E1no chov\u00E1n\u00ED kontrastu v z\u00E1vislosti na d\u00E1vce dopadaj\u00EDc\u00EDch elektron\u016F, jejich energii a p\u0159\u00EDtomnosti vrstvy nad povrchem polovodi\u010De."@cs . . "2007-06-17+02:00"^^ . . . . "95;96" . "[8DE47C9E4143]" . . "Proceedings of the 8th Multinational Congress on Microscopy" . "Dynamic Behaviour of the Dopant Contrast in LVSEM"@en . "Frank, Lud\u011Bk" . "Czechoslovak Microscopy Society" . "RIV/68081731:_____/07:00092590!RIV08-GA0-68081731" . . . "Prague" . "Prague" . "Dynamick\u00E9 chov\u00E1n\u00ED kontrastu dopant\u016F v LVSEM"@cs . "2"^^ . . . "2"^^ . "Dynamic Behaviour of the Dopant Contrast in LVSEM" . "978-80-239-9397-4" . . . . "Contrast between differently doped areas in semiconductors can be observed in the secondary electron emission in a scanning electron microscope. Behaviour of the contrast in dependence on the incident electron dose and energy and on the presence of surface adlayers has been studied on different doped samples."@en . . "Mika, Filip" . . "Dynamic Behaviour of the Dopant Contrast in LVSEM"@en . . "Dynamick\u00E9 chov\u00E1n\u00ED kontrastu dopant\u016F v LVSEM"@cs . "dopant contrast; LVSEM; secondary electrons"@en . . "Contrast between differently doped areas in semiconductors can be observed in the secondary electron emission in a scanning electron microscope. Behaviour of the contrast in dependence on the incident electron dose and energy and on the presence of surface adlayers has been studied on different doped samples." . "2"^^ .