. "Paul Scherrer Institute" . "Pou\u017Eit\u00ED n\u00EDzk\u00E9ho urychlovac\u00EDho nap\u011Bt\u00ED p\u0159i pozorov\u00E1n\u00ED zkouman\u00E9ho objektu se stalo v posledn\u00EDm desetilet\u00ED velmi popul\u00E1rn\u00ED. P\u0159\u00EDstroje schopn\u00E9 pracovat s dostate\u010Dn\u00FDm rozli\u0161en\u00EDm s urychlovac\u00EDm nap\u011Bt\u00EDm men\u0161\u00EDm ne\u017E 3 kV jsou naz\u00FDv\u00E1ny n\u00EDzkonap\u011B\u0165ov\u00E9 rastrovac\u00ED elektronov\u00E9 mikroskopy (LV SEM). Detekce zp\u011Btn\u011B odra\u017Een\u00FDch elektron\u016F (BSE) v LV SEM byla a\u017E doned\u00E1vna velmi obt\u00ED\u017En\u00E1. Pr\u00E1ce popisuje \u00FA\u010Dinn\u00FD zp\u016Fsob detekce n\u00EDzkoenergiov\u00FDch BSE pomoc\u00ED zm\u011Bny jejich energi\u00ED a trajektori\u00ED."@cs . "Detekce n\u00EDzkoenergiov\u00FDch zp\u011Btn\u011B odra\u017Een\u00FDch elektron\u016F v SEM"@cs . "Villigen" . "P(KJB200650501)" . . "Wandrol, Petr" . "Detection of Low Energy Backscattered Electrons in SEM" . . "2"^^ . . "low energy BSE; low voltage scanning electron microscope; detection"@en . . "Detection of Low Energy Backscattered Electrons in SEM"@en . "Detekce n\u00EDzkoenergiov\u00FDch zp\u011Btn\u011B odra\u017Een\u00FDch elektron\u016F v SEM"@cs . "517478" . "Detection of Low Energy Backscattered Electrons in SEM"@en . "61" . "1019-6447" . . . . "2005-08-28+02:00"^^ . "RIV/68081731:_____/05:00022408!RIV06-AV0-68081731" . . "Detection of Low Energy Backscattered Electrons in SEM" . . "1"^^ . "Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable. An efficient way of low energy BSE detection is described in this work."@en . "Autrata, Rudolf" . . "Davos" . . . . . . "Application of the low accelerating voltage of the primary electron beam became due to its obvious advantages very popular in last decade. Instruments which are able to work with accelerating voltage of 3 keV and lower are called Low Voltage Scanning Electron Microscopes (LV SEMs). Detection of the backscattered electrons (BSEs) in LV SEM is because of their low energy very questionable. An efficient way of low energy BSE detection is described in this work." . "RIV/68081731:_____/05:00022408" . "[1FA6FD299963]" . "Proceedings - Microscopy Conference 2005 - Dreil\u00E4ndertagung /6./" . . "2"^^ .