. "1) Polovodi\u010Dov\u00FD kontrast v SE pozorovan\u00FD v SEM"@cs . "Villigen" . "SE contrast; 2D dopant profiling; SEM"@en . "Although the dopant contrast in SEM has now been studied for more than a decade, a clear explanation of it remains a matter for the future. This study aims to examine the contrast behaviour with the emission angle and electron dose delivered to the sample."@en . "Secondary Electron Contrast of doped Semiconductor Structures in SEM" . . . "Although the dopant contrast in SEM has now been studied for more than a decade, a clear explanation of it remains a matter for the future. This study aims to examine the contrast behaviour with the emission angle and electron dose delivered to the sample." . . "50" . . "[75CB20657F43]" . "Secondary Electron Contrast of doped Semiconductor Structures in SEM"@en . . "Proceedings - Microscopy Conference 2005 - Dreil\u00E4ndertagung /6./" . "Mika, Filip" . . "542056" . . "RIV/68081731:_____/05:00022404!RIV06-GA0-68081731" . "2005-08-28+02:00"^^ . "Paul Scherrer Institute" . . "1019-6447" . "V p\u0159\u00EDsp\u011Bvku jde o studium kontrastn\u00EDch mechanizm\u016F v polovodi\u010Dov\u00FDch struktur\u00E1ch s ohrani\u010Den\u00FDmi dopovan\u00FDmi oblastmi pomoc\u00ED rastrovac\u00EDho mikroskopu. Je zde pops\u00E1n vliv uhlov\u00E9ho rozlo\u017Een\u00ED emise SE a vliv mno\u017Estv\u00ED proudu dodan\u00E9ho na vzorek na tvorbu kontrastu a jeho p\u0159\u00EDpadnou inverzi."@cs . . . "2"^^ . "Frank, Lud\u011Bk" . "RIV/68081731:_____/05:00022404" . "P(GA102/05/2327)" . . . . "Davos" . "2"^^ . . "1"^^ . "1) Polovodi\u010Dov\u00FD kontrast v SE pozorovan\u00FD v SEM"@cs . . . "Secondary Electron Contrast of doped Semiconductor Structures in SEM"@en . "Secondary Electron Contrast of doped Semiconductor Structures in SEM" .