"Konvalina, Ivo" . . "RIV/68081731:_____/04:00109103!RIV/2005/AV0/A12005/N" . "Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM"@en . "SEM;detective quantum efficiency;electron trajectories"@en . "Vliv magnetick\u00E9ho a elektrostatick\u00E9ho pole v oblasti vzorku na trajektorie sekund\u00E1rn\u00EDch elektron\u016F v REM"@cs . . "Detektory Everhart-Thornley-ho typu se \u0161iroce pou\u017E\u00EDvaj\u00ED v REM pro sb\u011Br sekund\u00E1rn\u00EDch elektron\u016F (SE). Na prvn\u00ED pohled se zd\u00E1, \u017Ee elektrostatick\u00E9 pole na p\u0159edn\u00ED stran\u011B s\u00ED\u0165ky, kter\u00E1 je na kladn\u00E9m potenci\u00E1lu n\u011Bkolika set volt\u016F, p\u0159it\u00E1hne v\u0161echny SE s energi\u00ED pod 50 eV nebo alespo\u0148 elektrony emitovan\u00E9 s energi\u00ED 1-5 eV. Av\u0161ak zji\u0161t\u011Bn\u00E1 detek\u010Dn\u00ED kvantov\u00E1 \u00FA\u010Dinnost (DQE) mnoha detektor\u016F byla v\u00FDrazn\u011B men\u0161\u00ED ne\u017E jedna. To je zp\u016Fsobeno slo\u017Eit\u00FDm rozlo\u017Een\u00EDm elektrostatick\u00FDch a magnetick\u00FDch pol\u00ED v okol\u00ED vzorku, kter\u00E9 ovliv\u0148uj\u00ED trajektorie SE. DQE siln\u011B z\u00E1vis\u00ED na sb\u011Brov\u00E9 \u00FA\u010Dinnosti, co\u017E je procento emitovan\u00FDch \u010D\u00E1stic, kter\u00E9 dopadnou na detektor. Prvn\u00ED simulace trajektori\u00ED elektron\u016F nazna\u010Duj\u00ED hodnoty sb\u011Brov\u00E9 \u00FA\u010Dinnosti ET detektoru dokonce men\u0161\u00ED ne\u017E 0.01 p\u0159i mal\u00FDch pracovn\u00EDch vzd\u00E1lenostech"@cs . . . . . "Berlin" . "Berlin" . "The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here"@en . . . . "2"^^ . "P(IAA1065304)" . "Autumn School on Materials Science and Electron Microscopy 2004 - Emerging Microscopy for Advanced Materials Development: Imaging and Spectroscopy on Atomic Scale" . "567918" . "Vliv magnetick\u00E9ho a elektrostatick\u00E9ho pole v oblasti vzorku na trajektorie sekund\u00E1rn\u00EDch elektron\u016F v REM"@cs . . "Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM" . . . . "24/1;24/2" . "3"^^ . "The Everhart-Thornley (ET) type detector is widely used in SEM for collection of secondary electrons (SE). At first glance the electrostatic field of the front grid, biased to a positive potential of several hundred volts, might be thought to attract all SE of kinetic energy below 50 eV or at least those emitted at 1-5 eV, i.e. near the SE spectrum peak. However, the detective quantum efficiency (DQE) of such detectors has been found significantly below one. Due to complicated distribution of electrostatic and magnetic fields around the specimen, which influence the SE trajectories, the DQE depends heavily on the collection efficiency (CE), i.e. the proportion of emitted species that impact on the detector. Preliminary simulations of electron trajectories indicated the CE values for the ET detector even below 0.1 for small working distances while more detailed results are reported here" . "Humboldt University of Berlin" . . "[AD345B49557D]" . . "M\u00FCllerov\u00E1, Ilona" . . "2004-10-03+02:00"^^ . "RIV/68081731:_____/04:00109103" . "Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM"@en . "Influence of magnetic and electrostatic fields in the specimen vicinity on trajectories of secondary electrons in SEM" . . "3"^^ . . "Frank, Lud\u011Bk" .