"2003-06-01+02:00"^^ . . . . "85 ; 86" . "2"^^ . "RIV/68081731:_____/03:12030034!RIV/2004/AV0/A12004/N" . "Current trends in scanning low energy electron microscopy (SLEEM)." . . "Current trends in scanning low energy electron microscopy (SLEEM)."@en . "Pula [HR]" . "0"^^ . . "2"^^ . "scanning electron microscopy; primary beam energy; field emission gun"@en . "Current trends in scanning low energy electron microscopy (SLEEM)."@en . "0"^^ . . . . . "602508" . "P(IAA1065304), Z(AV0Z2065902)" . . . . "Zagreb" . . . . . "Frank, Lud\u011Bk" . "The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f" . "M\u00FCllerov\u00E1, Ilona" . "[047A965E634D]" . . "RIV/68081731:_____/03:12030034" . "The resolution of 1 nm at primary beam energy 15 keV and 1.5 nm at 1kV is being guaranteed for an up-to-date commercially available scanning electro n microscope with a cold field emission (CFE) gun. Quite recently, SEM imaging down to 100 eV was demonstrated with resolution on the test specimen (Au/C) that can be estimated to 10 nm [1]. It is well known that the cathode lens (CL) objective lens has to be used in order to improve the resolution to several nm for energies in tens or even units of eV [2 to 5]. At low and very low energies the problem of resolution has to be addressed specifically. The standard quadratic formula (SQF) has proved to provide a maximum estimate to the probe size [6]. This summation rule results from convolution of Gaussian confusion discs in which the ray radii are considered as mutually independent random variables with normal distributions. More realistic but still reasonable simple relation is obtained when defining the disc sizes via diameter encircling some current f"@en . . "2"^^ . . "Proceedings of the 6th Multinational Congress on Microscopy - European Extension." . "Current trends in scanning low energy electron microscopy (SLEEM)." . "Croatian Society for Electron Microscopy" .