. . . . . "Frank, Lud\u011Bk" . . "low energy SEM; scanning electron microscope; non-conductive specimens"@en . "116 ; 117" . "Sup. 3" . "M\u00FCllerov\u00E1, Ilona" . "Zadra\u017Eil, M." . . "Computer Controlled Low Energy SEM." . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "2"^^ . "[127A5A0674FE]" . "Ry\u0161\u00E1vka, J." . . . "3"^^ . "Computer Controlled Low Energy SEM."@en . "1431-9276" . . "In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applying the retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator disc with small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen."@en . . "Mika, Filip" . "Computer Controlled Low Energy SEM." . "601928" . . . . "Microscopy and Microanalysis" . "0"^^ . "0"^^ . . . "Computer Controlled Low Energy SEM."@en . "9" . . "RIV/68081731:_____/03:12030023" . "6"^^ . "P(IBS2065017), Z(AV0Z2065902)" . . . "RIV/68081731:_____/03:12030023!RIV/2004/AV0/A12004/N" . "Lopour, F." . "In the last two decades the low energy range is employed in the SEM operation for many reasons that include reduced charging of non-conductive specimens, better visualisation of surface relief, larger emitted signals and, at very low energies below 100 eV, new families of image contrasts. While energy around 1 keV is available in SEM of conventional design, extension down to about 200 eV is possible by using a compound objective lens with a retarding field element and very low energies require applying the retarding field directly to the specimen surface in so-called cathode lens [1 to 4]. The cathode lens can be inserted to below the standard objective lens of SEM [3] and most efficient is to use a coaxially positioned single-crystal scintillator disc with small central hole, serving as the anode and detector simultaneously [5]. In this configuration, an arbitrary low impact energy of primary electrons is adjusted by high negative biasing of the specimen." .