. "6"^^ . "[2A365D33B548]" . . "Velk\u00E9 Losiny [CZ]" . "\u010C\u00EDp, Ond\u0159ej" . "The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached."@en . "Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control." . . . "699333" . . "The scanning table, which is controlled by a PZT control system that has been constructed, is presented. It is used for a fine manipulation of a probe in measurement of the profile of the laser beam focused by high N. A. lens e.g.. The whole system has been calibrated by a two-axis laser interferometer. Where the PZT control system and the interferometer were connected to the CAN network and the actual X-Y position was saved to the PC synchronously with the CAN network time stamps generated by the PZT control system. Precision about 300nm at the positioning system was reached." . . . "Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control."@en . . "micropositioning; PID controller; interferometry measurements"@en . "Mikel, B\u0159etislav" . . "333;338" . "Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control." . "Washington" . . "RIV/68081731:_____/01:12010035" . . . . "Z(AV0Z2065902)" . "Proceedings of the 12th Czech-Slovak-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics (Proc. SPIE 4356)." . "RIV/68081731:_____/01:12010035!RIV/2003/AV0/A12003/N" . . "2000-09-12+02:00"^^ . "Harna, Z." . . "3"^^ . "0"^^ . "Two Axis Micropositioning System with Piezoelectric Actuators and Digital Control."@en . "0"^^ . "SPIE-The International Society for Optical Engineering" . . "2"^^ . "0-8194-4047-7" . .