"Svratka" . . . "[918AFED4D1A2]" . . "5"^^ . "Engineering Mechanics 2012" . "Prague" . "5"^^ . . . . "6"^^ . . "Petr\u00E1\u010Dkov\u00E1, Kl\u00E1ra" . "N\u00E1hl\u00EDk, Lubo\u0161" . "RIV/68081723:_____/12:00387901" . "Kruml, Tom\u00E1\u0161" . . . . . "Kub\u011Bna, Ivo" . "Truhl\u00E1\u0159, Michal" . "I, S" . "2012-05-14+02:00"^^ . . . "Determination of mechanical properties from microcompression test" . "ITAM AS CR, v. v. i." . . . . "Determination of mechanical properties from microcompression test"@en . "microcompression; thin film properties; focused ion beam; Young modulus; FEM"@en . "Determination of mechanical properties from microcompression test" . "This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 \u03BCm and their height was about 2 \u03BCm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling." . "130610" . . "RIV/68081723:_____/12:00387901!RIV13-AV0-68081723" . . . . "Determination of mechanical properties from microcompression test"@en . . . . "This paper describes a microcompression test of Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 \u03BCm and their height was about 2 \u03BCm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling."@en . "978-80-86246-40-6" .