"RIV/68081723:_____/10:00353917" . "nanocompression; thin Al film; focused ion beam"@en . "Kub\u011Bna, Ivo" . . . "273628" . . "Kruml, Tom\u00E1\u0161" . "Svratka" . . "Nanocompression of oriented pillars from Al thin film"@en . "In this paper, a new method of measurement of mechanical properties of thin films is presented. This method combines specimen preparation by focused ion beam (FIB) and compression test using nanoindentation device. Compression specimens were prepared from thin film, Al-1.5%Cu, which is commonly used in integrated circuit. Cylindrical specimens were prepared by FIB milling. The height of specimens (pillars) was about 2 mircrometers (equal to the film thickness) and their diameter was about 1.3 micrometers. The pillars are single crystalline, therefore the results depend on crystallographic orientation of pillar, which was specified by EBSD (electron backscatter diffraction). Stress-strain curves of the thin film were obtained in two representations."@en . . "RIV/68081723:_____/10:00353917!RIV11-AV0-68081723" . . . "Nanokomprese orientovan\u00FDch pil\u00ED\u0159k\u016F z tenk\u00E9 Al vrsty"@cs . "2"^^ . . "S, Z(AV0Z20410507)" . "2"^^ . . . "Nov\u00E1 metoda m\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev je pops\u00E1na v tomto \u010Dl\u00E1nku. Metoda kombinuje p\u0159\u00EDpravu vzork\u016F fokusovan\u00FDm iontov\u00FDm svazkem (FIB) a n\u00E1slednou kompresi pomoc\u00ED nanoindenta\u010Dn\u00EDho za\u0159\u00EDzen\u00ED. Kompresn\u00ED vzorky byly p\u0159ipraveny z tenk\u00E9 Al vrstvy kter\u00E1 je b\u011B\u017En\u011B pou\u017E\u00EDv\u00E1na v elektrick\u00FDch obvodech. Byly p\u0159ipraveny v\u00E1lcov\u00E9 pil\u00ED\u0159ky jejich\u017E vy\u00FD\u0161ka byla d\u00E1na tlou\u0161\u0165kou vrstvy (2 mikrometry) a pr\u016Fm\u011Br se pohyboval okolo 1,3 mikrometru. Jeliko\u017E pil\u00ED\u0159ky jsou monokrystalick\u00E9, v\u00FDsledky siln\u011B z\u00E1vis\u00ED na krystalografick\u00E9 orientaci pil\u00ED\u0159ku. Orientace byla ur\u010Dena pomoc\u00ED EBSD. K\u0159ivky nap\u011Bt\u00ED deformace byly z\u00EDsk\u00E1ny ve dvou reprezentac\u00EDch."@cs . "[ECDC35B39A9C]" . "Nanokomprese orientovan\u00FDch pil\u00ED\u0159k\u016F z tenk\u00E9 Al vrsty" . . . "\u00DAstav termomechaniky AV \u010CR" . . "Nov\u00E1 metoda m\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev je pops\u00E1na v tomto \u010Dl\u00E1nku. Metoda kombinuje p\u0159\u00EDpravu vzork\u016F fokusovan\u00FDm iontov\u00FDm svazkem (FIB) a n\u00E1slednou kompresi pomoc\u00ED nanoindenta\u010Dn\u00EDho za\u0159\u00EDzen\u00ED. Kompresn\u00ED vzorky byly p\u0159ipraveny z tenk\u00E9 Al vrstvy kter\u00E1 je b\u011B\u017En\u011B pou\u017E\u00EDv\u00E1na v elektrick\u00FDch obvodech. Byly p\u0159ipraveny v\u00E1lcov\u00E9 pil\u00ED\u0159ky jejich\u017E vy\u00FD\u0161ka byla d\u00E1na tlou\u0161\u0165kou vrstvy (2 mikrometry) a pr\u016Fm\u011Br se pohyboval okolo 1,3 mikrometru. Jeliko\u017E pil\u00ED\u0159ky jsou monokrystalick\u00E9, v\u00FDsledky siln\u011B z\u00E1vis\u00ED na krystalografick\u00E9 orientaci pil\u00ED\u0159ku. Orientace byla ur\u010Dena pomoc\u00ED EBSD. K\u0159ivky nap\u011Bt\u00ED deformace byly z\u00EDsk\u00E1ny ve dvou reprezentac\u00EDch." . "Engineering Mechanics 2010" . "Nanocompression of oriented pillars from Al thin film"@en . . . "Nanokomprese orientovan\u00FDch pil\u00ED\u0159k\u016F z tenk\u00E9 Al vrsty" . . . "978-80-87012-26-0" . "8"^^ . . "Prague" . "Nanokomprese orientovan\u00FDch pil\u00ED\u0159k\u016F z tenk\u00E9 Al vrsty"@cs . "2010-05-10+02:00"^^ .