. "378501" . . "2008-09-29+02:00"^^ . . . . "Boh\u00E1\u010D, Petr" . "RIV/68081723:_____/08:00314417" . "Z(AV0Z10100522), Z(AV0Z20410507)" . "Measurement of mechanical properties of thin films by nanocompression"@en . . . "Huta\u0159, Pavel" . "Technikou fokusovan\u00FDch iontov\u00FDch byly p\u0159ipraveny mal\u00E9 kompresn\u00ED v\u00E1lcov\u00E9 vzorky z tenk\u00E9 vrstvy Al-1.5%Cu. Tyto vzorky byly deformov\u00E1ny v kompresi s pou\u017Eit\u00EDm nanoindentoru a ploch\u00E9ho diamantov\u00E9ho hrotu. Byly tak z\u00EDsk\u00E1ny z\u00E1vislosti nap\u011Bt\u00ED-deformace s pom\u011Brn\u011B vysokou p\u0159esnost\u00ED."@cs . "P\u00E1nek, P." . "Measurement of mechanical properties of thin films by nanocompression"@en . "Velk\u00E9 Karlovice" . "M\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev pomoc\u00ED nanokomprese" . "Mechanical properties of thin films are not easy to be measured. This is particularly true in the case of plastic properties as the yield point, the work hardening rate or the ultimate stress. Nevertheless, such parameters are needed e.g. in the design of integrated circuits where the thermal stresses may lead to mechanical failure of the component. We applied two modern experimental facilities, the focused ion beam and the nanoindentation for exact measurement of plastic properties of a Al-1.5%Cu thin film prepared by PVD, used for electrical connection of integrated circuits. By FIB milling, cylindrical specimens were prepared. The height of the specimens was equal to the film thickness (2 m) and their diameter was about 1.3 m. These specimens were subjected to the compressive loading using the nanoindenter equipped by a flat punch. Stress-strain curves of the film were obtained rather precisely."@en . . "6"^^ . . . "Strany\u00E1nek, Martin" . . "\u010Ctvrtl\u00EDk, Radim" . "Vystav\u011Bl, T." . . "Kruml, Tom\u00E1\u0161" . "Ro\u017Enov pod Radho\u0161t\u011Bm" . "nanocompression; Al thin film; yield point"@en . "Vrstvy a povlaky 2008" . "M\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev pomoc\u00ED nanokomprese"@cs . . "3"^^ . . . . "[62F652DD602E]" . "M\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev pomoc\u00ED nanokomprese"@cs . "M\u011B\u0159en\u00ED mechanick\u00FDch vlastnost\u00ED tenk\u00FDch vrstev pomoc\u00ED nanokomprese" . "RIV/68081723:_____/08:00314417!RIV09-AV0-68081723" . . "LISS, a.s." . . "Kub\u011Bna, Ivo" . . "8"^^ . "Technikou fokusovan\u00FDch iontov\u00FDch byly p\u0159ipraveny mal\u00E9 kompresn\u00ED v\u00E1lcov\u00E9 vzorky z tenk\u00E9 vrstvy Al-1.5%Cu. Tyto vzorky byly deformov\u00E1ny v kompresi s pou\u017Eit\u00EDm nanoindentoru a ploch\u00E9ho diamantov\u00E9ho hrotu. Byly tak z\u00EDsk\u00E1ny z\u00E1vislosti nap\u011Bt\u00ED-deformace s pom\u011Brn\u011B vysokou p\u0159esnost\u00ED." . "978-80-969310-7-1" .