"Levdansky, V. V." . . "Kinetika fizicheskogo i khimicheskogo osazhdeniay vestestva iz gazovoi fazy v kanalakh." . . "142;145" . . . . "74" . . "0"^^ . "2"^^ . "0"^^ . "Inzhenerho-Fizicheskii Zurnal. (J. Eng. Phys. Thermodyn. 74, 1247-1252(2001)" . . "RIV/67985858:_____/01:27013047" . . "1"^^ . "Smol\u00EDk, Ji\u0159\u00ED" . . . "4"^^ . "Kinetics of Physical and Chemical Deposition of Substance from Gas Phase in Channels."@en . . "Kinetika fizicheskogo i khimicheskogo osazhdeniay vestestva iz gazovoi fazy v kanalakh." . "684300" . "5" . "Na osnovanii molekulyarno-kineticheskogo podkhoda issleduiutsya processy fizicheskogo i khimicheskogo osazhdeniya vestestva iz gazovoi fazy na vnutrennei poverkhnosti kanala. Obsuzhdaetsya problema naneseniya rovnomernykh po polstite plenok." . . "RIV/67985858:_____/01:27013047!RIV/2003/AV0/A27003/N" . "[2124A47236E1]" . . "Z(AV0Z4072921)" . "0021-0285" . "deposition; gas phase"@en . "Kinetics of Physical and Chemical Deposition of Substance from Gas Phase in Channels."@en . "BY - B\u011Blorusk\u00E1 republika" . . "surfaceProcess of chemical and physical deposition of substance from gas phase on inner surface of channel are investigated on basis of molecular-kinetics approach. The problem of deposition of uniform in thickness films is discussed."@en .