"Prague" . "6"^^ . "Application of EUV optics to surface modification of materials"@en . "Choukourov, A." . "5"^^ . . "61721" . "RIV/61389021:_____/13:00395869!RIV14-MSM-61389021" . . . . "Bellingham, Washington" . "000329577700005" . . "Application of EUV optics to surface modification of materials" . "2013-04-15+02:00"^^ . "Kol\u00E1\u010Dek, Karel" . . "EUV; laser; radiation; source; capillary discharge; plasma; ablation; surface modification"@en . . . . "SPIE Press" . . "Frolov, Oleksandr" . "Proceedings of SPIE 8777" . . . . . "Prukner, V\u00E1clav" . . . . "7"^^ . . . "We report results of experiments connected with surface modi\uFB01cation of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials."@en . . "RIV/61389021:_____/13:00395869" . "978-0-8194-9579-2" . "Application of EUV optics to surface modification of materials"@en . "0277-786X" . . . . "Schmidt, Ji\u0159\u00ED" . "We report results of experiments connected with surface modi\uFB01cation of materials with an intense extreme ultraviolet (EUV) laser beam. Irradiated by the laser beam from a discharge-plasma EUV source (with wavelength of 46.9 nm) based on a high-current capillary discharge driver, the samples have been investigated by atomic-force microscope (AFM). The laser beam is focused with a spherical Si/Sc multilayer-coated mirror on polymethylmethacrylate (PMMA), gold-covered-PMMA and gallium arsenide (GaAs) samples. It turned out that desorption and ablation regimes, which are observed in all these cases strongly depends on substrate materials." . . "[B3CA1FCE84BC]" . "\u0160traus, Jaroslav" . "I, P(LG13029)" . "Frolov, Oleksandr" . . . "Application of EUV optics to surface modification of materials" .