"Kompositn\u00ED SiOx/fluorovod\u00EDkov\u00E9 plasmov\u011B polymerovan\u00E9 filmy s plnic\u00EDm faktorem od 0.01 do 0.7 byly p\u0159ipraveny pomoc\u00ED r.f. napra\u0161ov\u00E1n\u00ED se dv\u011Bma magnetrony. TEM mikrografy ukazuj\u00ED, \u017Ee komposity s vy\u0161\u0161\u00EDm SiOx obsahem maj\u00ED heterogenn\u00ED strukturu. FTIR, XPS a RBS/ERDA m\u011B\u0159en\u00ED potvrdila, \u017Ee komposity mohou b\u00FDt obcn\u011B pops\u00E1ny jako \u010D\u00E1ste\u010Dn\u011B oxidovan\u00E9 fluorouhl\u00EDkov\u00E9 plasmov\u00E9 polymery s SiOx inklusemi."@cs . "Kompositn\u00ED SiOx/fluorovod\u00EDkov\u00E9 plasmov\u011B polymerovan\u00E9 filmy p\u0159ipraven\u00E9 pomoc\u00ED r.f. magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED SiO2 a PTFE"@cs . . . "Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE" . "The thin composite SiOx/fluorocarbon plasma polymer films with filling factors ranging from 0.01 to 0.7 were prepared by r.f. sputtering from two balanced magnetrons. TEM micrographs suggest that at higher SiOx contents the composites have a heterogeneous structure. FTIR, XPS and RBS/ERDA measurements confirmed that the composite can be generally described as a partly oxidized fluorocarbon plasma polymer with SiOx inclusions." . "469424" . "Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE" . . "Trchov\u00E1, Miroslava" . "The thin composite SiOx/fluorocarbon plasma polymer films with filling factors ranging from 0.01 to 0.7 were prepared by r.f. sputtering from two balanced magnetrons. TEM micrographs suggest that at higher SiOx contents the composites have a heterogeneous structure. FTIR, XPS and RBS/ERDA measurements confirmed that the composite can be generally described as a partly oxidized fluorocarbon plasma polymer with SiOx inclusions."@en . . "Mackov\u00E1, Anna" . "RIV/61389013:_____/06:00042070" . . . . "Pihosh, Y." . "RIV/61389013:_____/06:00042070!RIV07-AV0-61389013" . . "P(ME 553), P(OC 527.10), Z(AV0Z10480505), Z(AV0Z40500505), Z(MSM0021620834)" . "Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE"@en . "Choukourov, A." . "0042-207X" . "1"^^ . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . "Kompositn\u00ED SiOx/fluorovod\u00EDkov\u00E9 plasmov\u011B polymerovan\u00E9 filmy p\u0159ipraven\u00E9 pomoc\u00ED r.f. magnetronov\u00E9ho napra\u0161ov\u00E1n\u00ED SiO2 a PTFE"@cs . "Composite SiOx/fluorocarbon plasma polymer films prepared by r.f. magnetron sputtering of SiO2 and PTFE"@en . "Vacuum" . . "composite films; magnetron; sputtering"@en . . . "Slav\u00EDnsk\u00E1, D." . "[0EA5141070DD]" . "Boldyryeva, Hanna" . . . "8"^^ . "7"^^ . . . "Kousal, J." . . . "81" . "38;44" . "1-4" . . . "Biederman, H." . .