"Vac\u00EDk, Ji\u0159\u00ED" . "AUG" . . . . "Taylor, Andrew" . . "J\u00E4ger, Ale\u0161" . "Hub\u00EDk, Pavel" . . "Mortet, Vincent" . . "47" . "We report on the preparation and characterisation of boron (B) doped nano-crystalline diamond (BNCD) layers grown over large areas (up to 50cm x 30cm) and at low substrate temperatures (<650\u00B0C) using microwave plasma enhanced chemical vapour deposition apparatus with linear antenna delivery apparatus (MW-LA-PECVD). B-NCD layers were grown in H2/CH4/CO2 and H2/CH4 gas mixtures with added trimethylboron (TMB). Layers with thicknesses of 150nm to 1\u03BCm have been prepared with B/C ratios up to 15000ppm over a range of CO2/CH4 ratios to study the effect of oxygen (O) on the incorporation rate of B into the solid phase and the effect on the quality of the BNCD with respect to sp3/sp2 ratio. Experimental results show the reduction of boron acceptor concentration with increasing CO2 concentration. Higher sp3/sp2 ratios were measured by Raman spectroscopy with increasing TMB concentration in the gas phase without CO2." . "8"^^ . . "000340318100004" . "We report on the preparation and characterisation of boron (B) doped nano-crystalline diamond (BNCD) layers grown over large areas (up to 50cm x 30cm) and at low substrate temperatures (<650\u00B0C) using microwave plasma enhanced chemical vapour deposition apparatus with linear antenna delivery apparatus (MW-LA-PECVD). B-NCD layers were grown in H2/CH4/CO2 and H2/CH4 gas mixtures with added trimethylboron (TMB). Layers with thicknesses of 150nm to 1\u03BCm have been prepared with B/C ratios up to 15000ppm over a range of CO2/CH4 ratios to study the effect of oxygen (O) on the incorporation rate of B into the solid phase and the effect on the quality of the BNCD with respect to sp3/sp2 ratio. Experimental results show the reduction of boron acceptor concentration with increasing CO2 concentration. Higher sp3/sp2 ratios were measured by Raman spectroscopy with increasing TMB concentration in the gas phase without CO2."@en . . "1"^^ . . "Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery" . "I, P(LM2011019), P(LM2011026)" . "0925-9635" . "Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery"@en . . . . "RIV/61389005:_____/14:00431502" . . . "large area; low temperature; boron doped nano-crystalline diamond; linear antenna MW PE CVD"@en . "Mistr\u00EDk, J." . "Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery" . "[3ADA2DE9CCEC]" . "10.1016/j.diamond.2014.05.002" . "8"^^ . . . "Fekete, Ladislav" . "Diamond and Related Materials" . "CH - \u0160v\u00FDcarsk\u00E1 konfederace" . . . "25651" . "RIV/61389005:_____/14:00431502!RIV15-AV0-61389005" . "Large area deposition of boron doped nano-crystalline diamond films at low temperatures using microwave plasma enhanced chemical vapour deposition with linear antenna delivery"@en . "Jan\u00ED\u010Dek, P." .