"7"^^ . . "Heberlein, J. V. R." . . "Bratislava" . "80-223-2018-8" . . . "RIV/61389005:_____/05:00030577" . "Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings" . . "Book of Contributes Papers" . . . "Podbansk\u00E9" . "Mackov\u00E1, Anna" . "2005-01-15+01:00"^^ . "RIV/61389005:_____/05:00030577!RIV06-AV0-61389005" . . . "Depozice tvrd\u00FDch pokryt\u00ED na b\u00E1zi nitrid\u016F k\u0159em\u00EDku pomoc\u00ED plasmaticky podpo\u0159en\u00E9 chemick\u00E9 depozice z plynn\u00E9 f\u00E1ze"@cs . "2"^^ . . . "Gerberich, W. W." . . "Vrstvy na b\u00E1zi nitridu k\u0159em\u00EDku o tvrdosti do 31 GPa byly nan\u00E1\u0161eny v trojit\u00E9m reaktoru s plasmatem pochod\u0148ov\u00E9ho v\u00FDboje. Tvrd\u00E9 vrstvy vy\u017Eaduj\u00ED teplotu podlo\u017Eky nad 1000oC a vykazuj\u00ED p\u0159\u00EDtomnost obou krystalick\u00FDch f\u00E1z\u00ED alfa- a beta-Si3N4."@cs . "Depozice tvrd\u00FDch pokryt\u00ED na b\u00E1zi nitrid\u016F k\u0159em\u00EDku pomoc\u00ED plasmaticky podpo\u0159en\u00E9 chemick\u00E9 depozice z plynn\u00E9 f\u00E1ze"@cs . "Zaj\u00ED\u010Dkov\u00E1, L." . "Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings"@en . "265;266" . "P(GA104/03/0385), Z(AV0Z10480505)" . "Films based on silicon nitride with hardness up to 31 GPa were deposited in a triple torch plasma reactor. The hard films required substrate temperatures above 1000oC and exhibited a presence of both alfa- and beta-Si3N4 crystallites."@en . "Wagner, N." . . "Pe\u0159ina, Vratislav" . "2"^^ . . "chemical vapor deposition; silicon nitride"@en . "546675" . . . . . "Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings" . "[AFD3A0FC0704]" . "Fyzik\u00E1lny \u00FAstav SAV" . "Cordill, M. J." . "Films based on silicon nitride with hardness up to 31 GPa were deposited in a triple torch plasma reactor. The hard films required substrate temperatures above 1000oC and exhibited a presence of both alfa- and beta-Si3N4 crystallites." . "Thermal Plasma Enhanced Chemical Vapor Deposition of Silicon Nitride Based Hard Coatings"@en .