"Thin CNx films were deposited by hybrid pulsed laser deposition system KrF excimer laser in combination with the additional radio-frequency discharge."@en . "11/12" . "2"^^ . "RIV/61388955:_____/01:54010234!RIV/2003/AV0/A54003/N" . "Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System." . . . "Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System."@en . . . "Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System." . "CZ - \u010Cesk\u00E1 republika" . "Optical Emission Spectroscopy of CN x Plasma Species in Hybrid Pulsed Laser Deposition System."@en . "Bul\u00ED\u0159, Ji\u0159\u00ED" . . . "0447-6441" . "371;373" . . . "P(IAA1010110), Z(AV0Z1010914), Z(AV0Z4040901)" . "[B9AB22325CC5]" . "Jemn\u00E1 mechanika a optika" . . "1"^^ . "Lan\u010Dok, J\u00E1n" . . "RIV/61388955:_____/01:54010234" . . "0"^^ . "690184" . "0"^^ . . "Zelinger, Zden\u011Bk" . "Thin CNx films were deposited by hybrid pulsed laser deposition system KrF excimer laser in combination with the additional radio-frequency discharge." . "46" . . "optical emission spectroscopy; - pulsed laser deposition; - CNx plasma species"@en . . "5"^^ . . . "Jel\u00EDnek, Miroslav" . "Novotn\u00FD, Michal" . . .