. "[EC6FDA946C37]" . "RIV/60461373:22340/07:00018430!RIV08-GA0-22340___" . "7"^^ . . . . . "\u0160nita, Dalimil" . "459598" . "22340" . . "P(GD104/03/H141)" . "P\u0159\u00EDsp\u011Bvek popisuje v\u00FDrobu sklen\u011Bn\u00FDch mikroza\u0159\u00EDzen\u00ED. Pro mikrostrukturaci skla jsou pou\u017Eity techniky mechanick\u00E9ho mikroobr\u00E1b\u011Bn\u00ED a kombinace optick\u00E9 UV-litografie a izotropn\u00EDho mokr\u00E9ho lept\u00E1n\u00ED. Pro spojen\u00ED dvou vrstev skla jsou testov\u00E1ny metody n\u00EDzkoteplotn\u00EDho spojov\u00E1n\u00ED a p\u0159\u00EDm\u00E9ho tepeln\u00E9ho spojov\u00E1n\u00ED. Jsou uvedeny p\u0159\u00EDklady vyroben\u00FDch mikroza\u0159\u00EDzen\u00ED." . . "Jindra, Tom\u00E1\u0161" . "V\u00FDroba fluidn\u00EDch mikro\u010Dip\u016F ze skeln\u00FDch substr\u00E1t\u016F"@cs . "P\u0159\u00EDsp\u011Bvek popisuje v\u00FDrobu sklen\u011Bn\u00FDch mikroza\u0159\u00EDzen\u00ED. Pro mikrostrukturaci skla jsou pou\u017Eity techniky mechanick\u00E9ho mikroobr\u00E1b\u011Bn\u00ED a kombinace optick\u00E9 UV-litografie a izotropn\u00EDho mokr\u00E9ho lept\u00E1n\u00ED. Pro spojen\u00ED dvou vrstev skla jsou testov\u00E1ny metody n\u00EDzkoteplotn\u00EDho spojov\u00E1n\u00ED a p\u0159\u00EDm\u00E9ho tepeln\u00E9ho spojov\u00E1n\u00ED. Jsou uvedeny p\u0159\u00EDklady vyroben\u00FDch mikroza\u0159\u00EDzen\u00ED."@cs . . . "V\u00FDroba fluidn\u00EDch mikro\u010Dip\u016F ze skeln\u00FDch substr\u00E1t\u016F" . "978-80-7080-024-9" . "1"^^ . "Fabrication of fluidic microchips of glass substrates"@en . "V\u00FDroba fluidn\u00EDch mikro\u010Dip\u016F ze skeln\u00FDch substr\u00E1t\u016F" . . "Reak\u010Dn\u00ED a transportn\u00ED jevy II" . . "2007-06-08+02:00"^^ . . "Praha" . . "3"^^ . "V\u00FDroba fluidn\u00EDch mikro\u010Dip\u016F ze skeln\u00FDch substr\u00E1t\u016F"@cs . "165-171" . . . "Vysok\u00E1 \u0161kola chemicko-technologick\u00E1 v Praze" . "Konopi\u0161t\u011B" . "Kotowski, J." . "microfabrication; micromachining; photolithography; glass etching; bonding"@en . . "RIV/60461373:22340/07:00018430" . "Fabrication of fluidic microchips of glass substrates"@en . . . "Paper is focused on fabrication glass microdevices. For fabrication are used following techniques: mechanical micromachining, optical photolithography, isotropic wet etching, low-temperature bonding and direct thermal bonding. Examples of fabricated devices are presented."@en .