. "3"^^ . "RIV/60461373:22310/12:43893964!RIV13-MSM-22310___" . . . . "Studium podstaty a kvantitativn\u00EDho vlivu nekorigovateln\u00FDch vad vzork\u016F p\u0159i m\u011B\u0159en\u00ED rezistivity tenk\u00FDch vrstev metodou Van der Pauw"@cs . "4"^^ . . "2"^^ . . . "68" . . "method; Pauw; der; Van; the; using; measurement; layer; thin; defects; incorrectable; impact; qualitative; and; fundamental; study; The"@en . "Studium podstaty a kvantitativn\u00EDho vlivu nekorigovateln\u00FDch vad vzork\u016F p\u0159i m\u011B\u0159en\u00ED rezistivity tenk\u00FDch vrstev metodou Van der Pauw" . "N\u00E1hl\u00EDk, Josef" . "Ka\u0161p\u00E1rkov\u00E1, Irena" . . . . "0037-668X" . . . . . "Fitl, P\u0159emysl" . . "The study of fundamental and qualitative impact of incorrigible defects in the thin layer measurement using the Van der Pauw method"@en . "The study of fundamental and qualitative impact of incorrigible defects in the thin layer measurement using the Van der Pauw method"@en . . . . "Pr\u00E1ce se zab\u00FDv\u00E1 typick\u00FDmi zjevn\u00FDmi i skryt\u00FDmi vadami vzork\u016F, pou\u017E\u00EDvan\u00FDch p\u0159i m\u011B\u0159en\u00ED plo\u0161n\u00E9ho odporu i objemov\u00E9 rezistivity tenk\u00FDch vrstev metodou van der Pauw. Zam\u011B\u0159uje se p\u0159edev\u0161\u00EDm na ty vady, kter\u00E9 vedou ve v\u00FDsledku k nekorigovateln\u00FDm chyb\u00E1m stanoven\u00E9 rezistivity."@cs . . . "CZ - \u010Cesk\u00E1 republika" . "Studium podstaty a kvantitativn\u00EDho vlivu nekorigovateln\u00FDch vad vzork\u016F p\u0159i m\u011B\u0159en\u00ED rezistivity tenk\u00FDch vrstev metodou Van der Pauw"@cs . "This work deals with the typical visible or hidden defects at the measurement of sheet resistance and volume resistivity of thin layers using van der Pauw technique. It is focused in particular on the defects which lead subsequently to the incorrigible errors of determined resistivity."@en . "S" . "[C4FFAE3797F9]" . . . "Pr\u00E1ce se zab\u00FDv\u00E1 typick\u00FDmi zjevn\u00FDmi i skryt\u00FDmi vadami vzork\u016F, pou\u017E\u00EDvan\u00FDch p\u0159i m\u011B\u0159en\u00ED plo\u0161n\u00E9ho odporu i objemov\u00E9 rezistivity tenk\u00FDch vrstev metodou van der Pauw. Zam\u011B\u0159uje se p\u0159edev\u0161\u00EDm na ty vady, kter\u00E9 vedou ve v\u00FDsledku k nekorigovateln\u00FDm chyb\u00E1m stanoven\u00E9 rezistivity." . . "RIV/60461373:22310/12:43893964" . "Studium podstaty a kvantitativn\u00EDho vlivu nekorigovateln\u00FDch vad vzork\u016F p\u0159i m\u011B\u0159en\u00ED rezistivity tenk\u00FDch vrstev metodou Van der Pauw" . . "Slaboproud\u00FD obzor" . "172084" . "22310" . . . . . . "2" .