. "Thin SiCx layer prepared by hybrid laser-magnetron deposition" . "Thin SiCx films were fabricated by hybrid laser-magnetron deposition system. Films topology, crystallinity, composition and optical emission spectra were studied." . "Kadlec, Jarom\u00EDr" . . . "Tenk\u00E9 povlaky SiCx deponovan\u00E9 hybridn\u00ED laserovou-magnetronovou technologi\u00ED"@cs . . . . . "Tenk\u00E9 povlaky SiCx deponovan\u00E9 hybridn\u00ED laserovou-magnetronovou technologi\u00ED"@cs . . "RIV/60162694:G43__/08:#0001807" . . . "Laser-magnetron deposition; SiCx thin films"@en . "5"^^ . "RIV/60162694:G43__/08:#0001807!RIV09-MO0-G43_____" . "0947-8396" . "1"^^ . . "Applied Physics A-Materials Science and Processing" . "Kocourek, Tom\u00E1\u0161" . . "Thin SiCx layer prepared by hybrid laser-magnetron deposition" . . "Thin SiCx layer prepared by hybrid laser-magnetron deposition"@en . "Jel\u00EDnek, Miroslav" . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "Zemek, Josef" . "5"^^ . "Hybridni laser-magnetronovou technologi\u00ED byly deponov\u00E1ny povlaky SiCx. Byla hodnocena topologie, krystalinita, chemick\u00E9 slo\u017Een\u00ED a emisn\u00ED spektra."@cs . . "93" . "3" . "P(GA202/06/0216), Z(MO0FVT0000404)" . "G43" . "399970" . . "Novotn\u00FD, Michal" . . "Thin SiCx films were fabricated by hybrid laser-magnetron deposition system. Films topology, crystallinity, composition and optical emission spectra were studied."@en . "[0AC478595288]" . "Thin SiCx layer prepared by hybrid laser-magnetron deposition"@en . "362SW" .