. "0863-1042" . . "5-7" . "Hubi\u010Dka, Zden\u011Bk" . . "The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions."@cs . . . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe"@en . "DE - Spolkov\u00E1 republika N\u011Bmecko" . . "Ad\u00E1mek, Petr" . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe" . "P(KAN101120701), Z(MSM0021620834)" . "8"^^ . . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe"@cs . "\u0160patenka, Petr" . "Stra\u0148\u00E1k, V\u00EDt\u011Bzslav" . "6"^^ . . "RIV/60076658:12410/08:00009203!RIV09-AV0-12410___" . . "Hippler, Reiner" . "4"^^ . "Contribution to plasma physics" . . "Tich\u00FD, Milan" . . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe" . . "398112" . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe"@en . "[BA962E9C1DF6]" . . "planar magnetron; probe diagnostics; electronegative plasma; electron density; negative ion density"@en . . . . "Study of electronegative Ar/O-2 discharge by means of Langmuir probe"@cs . . "The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions." . "000258126900020" . "RIV/60076658:12410/08:00009203" . . "12410" . "Wrehde, Joseph" . "48" . . . . "The paper presents systematic Langmuir probe diagnostic of a dc discharge in Ar/O-2 mixture with low fraction of O-2, burning in a sputtering planar magnetron. Electron density, electron temperature and plasma potential are investigated in dependence upon experimental conditions like pressure, rate of oxygen, incoming power, and on balanced or unbalanced mode of magnetron. A new method of determining negative-ion density from the current-voltage characteristic is proposed. This method is based on comparison of the characteristic measured in electronegative plasma (e.g. Ar/O-2) with a reference characteristic scanned in ail electropositive counterpart (Ar), existing in similar conditions."@en . . "Bla\u017Eek, Josef" .