"117-120" . "This work presents a comparison study of photochemical activity of titanium dioxide deposited by three different methods: by low pressure plasma enhanced chemical vapor deposition (PECVD): capacitive radio frequency (RF) discharge, by atmospheric pressure PECVD barrier torch plasma jet and by low pressure physical vapor deposition (PVD) hollow cathode plasma jet sputtering system. Vapors of titanium (IV) isopropoxide Ti[OCH(CH3)2]4 were used as growth precursors for titanium dioxide films depositon by the both PECVD methods, whereas titanium hollow cathode nozzle was reactively sputtered in the PVD method. Titanium dioxide films were studied by X-ray diffraction (XRD) for crystalline phase analysis and furthermore by measurement of thickness and deposition rate. All the systems produce film with anatase structure. The photochemical activity was tested on decomposition of the Acid orange (AO7). The films also manifest strong microbiological activity, which is demonstrated on inactivation of bacteria." . "15" . . "4"^^ . "\u0160patenka, Petr" . . "Titanium Dioxide Film; Photocatalytic Decomposition; PECVD; low pressure plasma"@en . "This work presents a comparison study of photochemical activity of titanium dioxide deposited by three different methods: by low pressure plasma enhanced chemical vapor deposition (PECVD): capacitive radio frequency (RF) discharge, by atmospheric pressure PECVD barrier torch plasma jet and by low pressure physical vapor deposition (PVD) hollow cathode plasma jet sputtering system. Vapors of titanium (IV) isopropoxide Ti[OCH(CH3)2]4 were used as growth precursors for titanium dioxide films depositon by the both PECVD methods, whereas titanium hollow cathode nozzle was reactively sputtered in the PVD method. Titanium dioxide films were studied by X-ray diffraction (XRD) for crystalline phase analysis and furthermore by measurement of thickness and deposition rate. All the systems produce film with anatase structure. The photochemical activity was tested on decomposition of the Acid orange (AO7). The films also manifest strong microbiological activity, which is demonstrated on inactivation of bacteria."@en . "RIV/60076658:12410/07:00008117" . "RIV/60076658:12410/07:00008117!RIV08-GA0-12410___" . . . "Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD"@en . . "Hubi\u010Dka, Z." . . "Kolouch, A." . "Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD" . "Horsk\u00FD, J." . . "Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD"@en . "Fotokatalytick\u00FD rozklad organick\u00FDch l\u00E1tek na tenk\u00E9 vrstv\u011B TiO2 p\u0159ipraven\u00E9 metodou PECVD"@cs . "6"^^ . . "Byly zkoum\u00E1ny vrstvy TiO2 deponovan\u00E9 n\u00EDzkotlak\u00FDm kapacitn\u00EDm RF v\u00FDbojem, RF tryskou pracuj\u00EDc\u00ED za atmosf\u00E9rick\u00E9ho tlaku a nizkotlak\u00FDm napra\u0161ov\u00E1n\u00EDm. Ve v\u0161ech vrstv\u00E1ch byla nalezena krystalick\u00E1 struktura odpov\u00EDdaj\u00EDc\u00ED anat\u00E1zu. Fotokatalytick\u00E1 \u00FA\u010Dinnost byla testov\u00E1na na z\u00E1klad\u011B rozkladu organick\u00E9ho barviva Acid ornage. Vrstvy rovn\u011B\u017E vykazovaly antibakteri\u00E1ln\u00ED \u00FA\u010Dinky."@cs . "H\u00E1jkov\u00E1, P." . . . "Fotokatalytick\u00FD rozklad organick\u00FDch l\u00E1tek na tenk\u00E9 vrstv\u011B TiO2 p\u0159ipraven\u00E9 metodou PECVD"@cs . "12410" . "2007 Society of Vacuum Coaters" . . "Horsk\u00E1, I." . . "Photocatalytic Decomposition of Organic Matter on Titanium Dioxide Film prepared by PECVD" . "[5D1B5BEA62A7]" . "1"^^ . "US - Spojen\u00E9 st\u00E1ty americk\u00E9" . "P(GA202/05/2242)" . "441225" . . "x" . "0737-5921" . . . .