"Univerzita Komensk\u00E9ho v Bratislave" . . "The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements." . "416250" . "Hubi\u010Dka, Z." . "3"^^ . . . "\u0160patenka, Petr" . . "The contribution is focused on comparative diagnostics of deposited TiOx thin films created by different plasma sources under different experimental conditions. The TiOx layer were created from titanium isopropoxide vapours delivered into discharges zones of: (i) Ar/O2 surfatron discharge, working at microwave frequency 2.45 GHz, operated at reduced pressure and (ii) He/N2 pulsed RF driven barrier-torch discharge burning at open atmosphere. The layers were deposited on glass substrates and subsequently diagnosed by XRD before and also after thermal annealing and AFM measurements."@en . "Deposition of thin TiOx layers using plasma sources of jet types" . "Deposition of thin TiOx layers using plasma sources of jet types"@en . "7"^^ . "12410" . "2"^^ . "Stra\u0148\u00E1k, V\u00EDt\u011Bzslav" . "RIV/60076658:12410/07:00008092" . . "RIV/60076658:12410/07:00008092!RIV08-GA0-12410___" . "Kment, S." . . "Chichina, M." . . . . "In: Matu\u0161ka, J., Mat\u011Bj\u010D\u00EDk, S., Skaln\u00FD, J.D. (ed.): Proceedings of SAPP XVI, 2007" . . "Deposition of thin TiOx layers using plasma sources of jet types"@en . "TiOx; anatase; XRD; surfatron; RF nozzle"@en . . "Pr\u00E1ce p\u0159in\u00E1\u0161\u00ED srovn\u00E1vac\u00ED studii TiO2 vrstev p\u0159ipraven\u00FDch mikrovlnn\u00FDm v\u00FDbojem generovan\u00FDm surfatronem ve sm\u011Bs\u00ED Ar-O2 a pulzn\u00EDm bari\u00E9rov\u00FDm v\u00FDbojem generovan\u00FDm ve sm\u011Bsi He-N2 za atmosf\u00E9rick\u00E9ho tlaku. Byl studov\u00E1n vliv kalcinace na krystalovou strukturu vrstev."@cs . "139-140" . "Bratislava" . "978-80-89186-13-6" . . . . . "[D37C19290D15]" . . "Depozice tenk\u00FDch TiOx vrstev pomoc\u00ED tryskov\u00FDch zdroj\u016F plazmatu"@cs . . "Churpita, O." . "Depozice tenk\u00FDch TiOx vrstev pomoc\u00ED tryskov\u00FDch zdroj\u016F plazmatu"@cs . "Tich\u00FD, Milan" . "Deposition of thin TiOx layers using plasma sources of jet types" . . "P(GA202/05/2242)" . .