. "Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes"@en . "In: M. Mutlu, G. Dinescu, R. F\u00F6rch, J.M.M. Martinez, J. Vyskocil (Eds) Plasma Polymers and Related Materials" . "12410" . "Z(MSM 124100004)" . . . "carbon nanotube; PECVD; plasma diagnostics; model calculations; field emission"@en . . . . "Taeschner, Ch." . "Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes" . "Experiment\u00E1ln\u00ED a teoretick\u00FD v\u00FDzkum depozice uhl\u00EDkov\u00FDch nanotrubic metodou PE CVD"@cs . "521013" . "Experiment\u00E1ln\u00ED a teoretick\u00FD v\u00FDzkum depozice uhl\u00EDkov\u00FDch nanotrubic metodou PE CVD"@cs . . "5"^^ . "Leonhardt, Albert" . . "58-62" . "RIV/60076658:12410/05:00006411!RIV06-MSM-12410___" . "Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes" . "2"^^ . . "RIV/60076658:12410/05:00006411" . "\u0160patenka, Petr" . "Bla\u017Eek, Josef" . "Hacettepe University Press" . . "Ankara" . . "[33A481A9688E]" . "5"^^ . . . "The plasma enhanced hot filament chemical vapor deposition used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the nanotubes' growth. It is demonstrated that the production of reactive heavy particles takes place predominantly in the sheath region, close to the negative biased substrate. Model calculations demonstrate the role of the electrical forces on the aligned growth of nanotubes and optimum properties for electron field emission from the nanotube tips."@en . . "Experimental and Theoretical Investigation of Plasma Enhanced Hot filament Chemical Vapour Deposition of Carbon Nanotubes"@en . . "The plasma enhanced hot filament chemical vapor deposition used for deposition of carbon nanotubes was investigated using Langmuir probes and optical emission spectroscopy. The electron density, electron temperature and plasma potential were measured in relation to the discharge voltage and substrate temperature. The results are discussed in connection with the conditions for the nanotubes' growth. It is demonstrated that the production of reactive heavy particles takes place predominantly in the sheath region, close to the negative biased substrate. Model calculations demonstrate the role of the electrical forces on the aligned growth of nanotubes and optimum properties for electron field emission from the nanotube tips." . "P\u00E1cal, F." . . . "975-491-194-0" . "Proces PECVD p\u0159i depozici uhl\u00EDkov\u00FDch nanotrubic byl studov\u00E1n prost\u0159ednictv\u00EDm Langmuirovy sondy a optick\u00E9 spektroskopie. Elektronov\u00E1 hustota a teplota a potenci\u00E1l plazmatu byly analyzov\u00E1ny ve vztahu k nap\u011Bt\u00ED v\u00FDboje a teplot\u011B substr\u00E1tu. V\u00FDsledky jsou diskutov\u00E1ny v souvislosti s podm\u00EDnkami r\u016Fstu nanotrubic. Je uk\u00E1z\u00E1no, \u017Ee produkce t\u011B\u017Ek\u00FDch \u010D\u00E1stic prob\u00EDh\u00E1 p\u0159edev\u0161\u00EDm v p\u0159\u00EDelektrodov\u00E9 oblasti, v bl\u00EDzkosti substr\u00E1tu o z\u00E1porn\u00E9m nap\u011Bt\u00ED. Modelov\u00E9 v\u00FDpo\u010Dty demonstruj\u00ED vliv elektrick\u00FDch sil na zarovnan\u00FD r\u016Fst nanotrubic a stanovuj\u00ED optim\u00E1ln\u00ED podm\u00EDnky pro poln\u00ED emisi elektron\u016F z jejich zakon\u010Den\u00ED."@cs . .