. . "APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING" . "Alloyed ZnO:Al thin ?lms were prepared by a pulsed laser deposition by the altering of two pure targets (ZnO and Al) during the deposition process. Two deposition temperatures ( ? 197 \u00B0C and 400 \u00B0C) were applied and differences of diffusion dynamics were compared. As-grown layered ?lms were annealed and aluminium distribution was homogenized. The results revealed that the amorphous structure (samples grown at ? 197 \u00B0C) of ZnO provide more positive conditions for ef?cient Al diffusion in comparison with crystalline structure (samples grown at 400 \u00B0C). A detailed investigation by SIMS depth pro?ling con?rmed a homogeneous chemical composition of annealed and recrystallized ?lms which exhibited a porous nature and wurtzite crystalline structure." . . . . "4" . "Michalka, Miroslav" . "DE - Spolkov\u00E1 republika N\u011Bmecko" . "In-process ZnO thin films alloying during pulsed laser deposition" . "crystal structure; amorphous structure; pulsed laser deposition; ZnO"@en . "Alloyed ZnO:Al thin ?lms were prepared by a pulsed laser deposition by the altering of two pure targets (ZnO and Al) during the deposition process. Two deposition temperatures ( ? 197 \u00B0C and 400 \u00B0C) were applied and differences of diffusion dynamics were compared. As-grown layered ?lms were annealed and aluminium distribution was homogenized. The results revealed that the amorphous structure (samples grown at ? 197 \u00B0C) of ZnO provide more positive conditions for ef?cient Al diffusion in comparison with crystalline structure (samples grown at 400 \u00B0C). A detailed investigation by SIMS depth pro?ling con?rmed a homogeneous chemical composition of annealed and recrystallized ?lms which exhibited a porous nature and wurtzite crystalline structure."@en . "6"^^ . "80384" . "Uherek, Franti\u0161ek" . "23640" . "P(1M06031)" . "In-process ZnO thin films alloying during pulsed laser deposition"@en . "2"^^ . "Netrvalov\u00E1, Marie" . . "110" . "0947-8396" . "Vincze, Andrej" . . "\u0160utta, Pavol" . . "6"^^ . . "In-process ZnO thin films alloying during pulsed laser deposition" . "Bruncko, Jaroslav" . . . "RIV/49777513:23640/13:43918218!RIV14-MSM-23640___" . . . "RIV/49777513:23640/13:43918218" . . "In-process ZnO thin films alloying during pulsed laser deposition"@en . . . . "[091030079ECA]" . . "10.1007/s00339-012-7190-1" .