"Raman spectroscopy; X-ray diffraction; PE-CVD; Phase transition; a-Si:H ?lm"@en . "RIV/49777513:23640/10:43898566" . "4" . "4"^^ . . "Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition" . . . "M\u00FCllerov\u00E1, Jarmila" . . "10.1016/j.vacuum.2010.01.021" . "\u0160utta, Pavol" . . . "P(1M06031)" . "4"^^ . "0042-207X" . . "Pru\u0161\u00E1kov\u00E1, Lucie" . "GB - Spojen\u00E9 kr\u00E1lovstv\u00ED Velk\u00E9 Brit\u00E1nie a Severn\u00EDho Irska" . "Vacuum" . . . . . . "Vavru\u0148kov\u00E1, Veronika" . "5"^^ . . "Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition"@en . "85" . "277145" . "23640" . "The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy." . "Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition"@en . . "Optical and structural characterization of inhomogeneities in a-Si:H to mc-Si transition" . "RIV/49777513:23640/10:43898566!RIV12-MSM-23640___" . . "[CC0E415F5EBD]" . . . . "The a-Si:H ?lms with different thickness and microstructure have been deposited with rf-PECVD using a plasma of silane diluted with hydrogen. The structure and optical analysis were carried out by X-ray diffraction, UV/VIS and Raman spectroscopy. Spectral refractive indices, optical energy band gaps, extinction coef?cients, phases ratio and grain size were determined as a function of the hydrogen dilution (R = H2/SiH4). Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to micro-crystalline hydrogenated silicon (mc-Si:H). XRD analysis indicated that ?lms with R = 0 and R = 20 were amorphous and homogeneous, while ?lms with R = 40 and higher were micro-crystalline consisting medium range ordered silicon hydride (Si4H) and mc-Si phases with different size of crystallites, which was con?rmed also by Raman spectroscopy."@en . . . "Netrvalov\u00E1, Marie" .