"978-1-4244-8572-7" . "23640" . . "Schaaf, P." . . "2"^^ . "Effect of Substrate Temperature on Oblique-Angle Sputtered ZnO:Ga Thin Films"@en . . "Novotn\u00FD, Ivan" . . . "RIV/49777513:23640/10:00503489" . "Effect of Substrate Temperature on Oblique-Angle Sputtered ZnO:Ga Thin Films" . . "4"^^ . "8"^^ . . . "ASDAM 2010" . . "256183" . "Kotorov\u00E1, Dominika" . . . . "Flickyngerov\u00E1, So\u0148a" . "Smolenice Castle, Slovakia" . "Effect of Substrate Temperature on Oblique-Angle Sputtered ZnO:Ga Thin Films" . "Tvaro\u017Eek, Vladim\u00EDr" . "[606F2814B66B]" . "Spiess, L." . "New York" . "IEEE Nuclear and Plasma Sciences Society" . "Effect of Substrate Temperature on Oblique-Angle Sputtered ZnO:Ga Thin Films"@en . "RIV/49777513:23640/10:00503489!RIV11-MSM-23640___" . "Netrvalov\u00E1, Marie" . . "oblique-angle sputtering; ZnO:Ga; deposition temperature"@en . "P(1M06031)" . "A study of the effect of substrate temperature on oblique-angle sputtered galium- doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 x 10 -3 ohm cm together with an increase of their optical transmittance over 90%." . . "A study of the effect of substrate temperature on oblique-angle sputtered galium- doped zinc oxide (GZO) thin films was carried out. Both the oblique-angle sputtering and the substrate temperature lowered the resistivity of GZO thin films down to 4 x 10 -3 ohm cm together with an increase of their optical transmittance over 90%."@en . . "2010-01-01+01:00"^^ . . "\u0160utta, Pavol" . .