"0169-4332" . . . "Surface modification of doped ZnO thin films" . "Surface modification of doped ZnO thin films"@en . "18" . "RIV/49777513:23640/10:00503338" . . "Thin-film solar cell; ZnO:Al; Sputtering"@en . "\u0160utta, Pavol" . . . "23640" . . "291137" . "Tvaro\u017Eek, Vladim\u00EDr" . "Flickyngerov\u00E1, So\u0148a" . "Skriniarova, J." . "Surface modification of doped ZnO thin films" . "7"^^ . . "256" . "Surface modification of doped ZnO thin films"@en . . . "Applied Surface Science" . "Kov\u00E1\u010D, Jaroslav" . . . "[EABFFAA75152]" . "2"^^ . . "Effects of photo-assisted electrodeless and ion RF-sputter etching on the structural and optical properties of sputtered ZnO:Al thin films were investigated. Photo-assisted electrodeless etching was appropriate for getting ?smooth? surfaces and ion RF-sputter etching by high power has significantly modified the surface roughness with an increase of the light diffuse transmittance." . "4"^^ . "Effects of photo-assisted electrodeless and ion RF-sputter etching on the structural and optical properties of sputtered ZnO:Al thin films were investigated. Photo-assisted electrodeless etching was appropriate for getting ?smooth? surfaces and ion RF-sputter etching by high power has significantly modified the surface roughness with an increase of the light diffuse transmittance."@en . "RIV/49777513:23640/10:00503338!RIV11-MSM-23640___" . "P(1M06031)" . "NL - Nizozemsko" . . "Netrvalov\u00E1, Marie" . "Novotn\u00FD, Ivan" . . . .