"infrared camera measurement; PVD technologies"@en . "Temperature of Ti target in reactive magnetron sputtering process was measured by InfraRed (IR) camera. The IR radiation from hot target was detected through the IR transparent germanium window. The transmissivity of Ge window was measured with FTIR spectrometer. All three parts of sputtering process were measured - discharge starting, own deposition and cooling after deposition. Thermograms and line profiles through the surface temperatures of Ti target were compared for time of switch on and off of source, 10 and 20 seconds later. Possibilities of measuring with thermovision system were shown."@en . "RIV/49777513:23640/09:00502973!RIV10-MSM-23640___" . . . "RIV/49777513:23640/09:00502973" . . "23640" . . "3"^^ . "2009-10-01+02:00"^^ . "Vrstvy a povlaky 2009" . "Termovizn\u00ED m\u011B\u0159en\u00ED v PVD technologi\u00EDch" . "Teplota Ti ter\u010De p\u0159i reaktivn\u00EDm magnetronov\u00E9m napra\u0161ov\u00E1n\u00ED byla m\u011B\u0159ena termovizn\u00ED kamerou. Infra\u010Derven\u00E9 z\u00E1\u0159en\u00ED z ter\u010De bylo sn\u00EDm\u00E1no p\u0159es germaniov\u00E9 ok\u00E9nko, kter\u00E9 je v t\u011Bchto vlnov\u00FDch d\u00E9lk\u00E1ch propustn\u00E9. Propustnost Ge ok\u00E9nka byla m\u011B\u0159ena na FTIR spektrometru. M\u011B\u0159en\u00ED bylo prov\u00E1d\u011Bno p\u0159i v\u0161ech t\u0159ech etap\u00E1ch napra\u0161ov\u00E1n\u00ED - startov\u00E1n\u00ED v\u00FDboje, vlastn\u00ED depozice a chladnut\u00ED po depozici. Termogramy a \u010D\u00E1rov\u00E9 profily povrchov\u00E9 teploty Ti ter\u010De byly porovn\u00E1v\u00E1ny v \u010Dase za\u010D\u00E1tku depozice, ukon\u010Den\u00ED depozice, 10 a 20 s po jej\u00EDm ukon\u010Den\u00ED. Jsou uk\u00E1z\u00E1ny mo\u017Enosti m\u011B\u0159en\u00ED termovizn\u00EDm syst\u00E9mem." . "Infrared Camera Measurement in PVD Technologies"@en . . . "Honner, Milan" . "3"^^ . . "Teplota Ti ter\u010De p\u0159i reaktivn\u00EDm magnetronov\u00E9m napra\u0161ov\u00E1n\u00ED byla m\u011B\u0159ena termovizn\u00ED kamerou. Infra\u010Derven\u00E9 z\u00E1\u0159en\u00ED z ter\u010De bylo sn\u00EDm\u00E1no p\u0159es germaniov\u00E9 ok\u00E9nko, kter\u00E9 je v t\u011Bchto vlnov\u00FDch d\u00E9lk\u00E1ch propustn\u00E9. Propustnost Ge ok\u00E9nka byla m\u011B\u0159ena na FTIR spektrometru. M\u011B\u0159en\u00ED bylo prov\u00E1d\u011Bno p\u0159i v\u0161ech t\u0159ech etap\u00E1ch napra\u0161ov\u00E1n\u00ED - startov\u00E1n\u00ED v\u00FDboje, vlastn\u00ED depozice a chladnut\u00ED po depozici. Termogramy a \u010D\u00E1rov\u00E9 profily povrchov\u00E9 teploty Ti ter\u010De byly porovn\u00E1v\u00E1ny v \u010Dase za\u010D\u00E1tku depozice, ukon\u010Den\u00ED depozice, 10 a 20 s po jej\u00EDm ukon\u010Den\u00ED. Jsou uk\u00E1z\u00E1ny mo\u017Enosti m\u011B\u0159en\u00ED termovizn\u00EDm syst\u00E9mem."@cs . "978-80-969310-9-5" . . . "[27A4B63A6F6D]" . "Termovizn\u00ED m\u011B\u0159en\u00ED v PVD technologi\u00EDch" . "Digital Graphics" . "Termovizn\u00ED m\u011B\u0159en\u00ED v PVD technologi\u00EDch"@cs . "Ro\u017Enov pod Radho\u0161t\u011Bm" . . "Tren\u010D\u00EDn" . "4"^^ . "Martan, Ji\u0159\u00ED" . . . "P(2A-1TP1/080), Z(MSM4977751302)" . "Infrared Camera Measurement in PVD Technologies"@en . "345947" . "Termovizn\u00ED m\u011B\u0159en\u00ED v PVD technologi\u00EDch"@cs . . . "Tesa\u0159, Ji\u0159\u00ED" . . . . . .