"Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects" . . "Central European Journal of Physics" . "2" . "[09C57F12CDE4]" . . . "P(1M06031)" . . "6"^^ . . . . "Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects" . "RIV/49777513:23640/09:00501545!RIV10-MSM-23640___" . "We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (\u03BCc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E04 (energy at which the absorption coefficient is equal to 104 cm-1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size." . "Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects"@en . . . "000265522000019" . . "23640" . . . . "331799" . "M\u00FCllerov\u00E1, Jarmila" . "Vavru\u0148kov\u00E1, Veronika" . "PL - Polsk\u00E1 republika" . "thin-film silicon; absorption coefficient; optical band gap energy; volume fraction"@en . . "Optical absorption in PECVD deposited thin hydrogenated silicon in light of ordering effects"@en . "RIV/49777513:23640/09:00501545" . "7" . "1895-1082" . . "\u0160utta, Pavol" . "2"^^ . . "We report results obtained from measurements of optical transmittance spectra carried out on a series of silicon thin films deposited by plasma-enhanced chemical vapour deposition (PECVD) from silane diluted with hydrogen. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (\u03BCc-Si:H). Spectral refractive indices and absorption coefficients were determined from transmittance spectra. The spectral absorption coefficients were used to determine the Tauc optical band gap energy, the B factor of the Tauc plots, E04 (energy at which the absorption coefficient is equal to 104 cm-1), and the Urbach energy as a function of the hydrogen dilution. The results were correlated with microstructure, namely volume fractions of the amorphous and crystalline phase with voids, and with the grain size."@en . "3"^^ . .