"P(1M06031)" . "NL - Nizozemsko" . "RIV/49777513:23640/08:00501248" . "We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H." . "RIV/49777513:23640/08:00501248!RIV11-MSM-23640___" . . . . "Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen" . "Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen"@en . . . . . "We report results obtained from FTIR and TEM measurements carried out on silicon thin films deposited by plasma-enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen. The hydrogen content, the microstructure factor, the mass density and the volume per Si-H vibrating dipoles were determined as a function of the hydrogen dilution. Hydrogen dilution of silane results in an inhomogeneous growth during which the material evolves from amorphous hydrogenated silicon (a-Si:H) to microcrystalline hydrogenated silicon (mc-Si:H). With increasing dilution the transition from amorphous to microcrystalline phase appears faster and the average mass density of the films decreases. The mc-Si:H films are mixed-phase void-rich materials with changing triphasic volume fractions of crystalline and amorphous phases and voids. Different bonding configurations of vibrating Si-H dipoles were observed in the a-Si:H and mc-Si:H."@en . "Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen"@en . "0169-4332" . "1"^^ . . "12" . "Applied Surface Science" . . "Mikula, M." . "Van Elzakker, Gijs" . . "M\u00FCllerov\u00E1, Jarmila" . "6"^^ . "[953A7593137F]" . "000254243900015" . "5"^^ . . "Zeman, Miro" . "379356" . "Microstructure of hydrogenated silicon thin films prepared from silane diluted with hydrogen" . . "\u0160utta, Pavol" . "23640" . . . . "254" . . "thin-film silicon; amorphous phase; microcrystalline phase; hydrogen"@en .