"2008-06-27+02:00"^^ . . "The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films" . . . "Proceedings of the 14th International Conference on Applied physics of condensed matter" . "3"^^ . . . . "Slovensk\u00E1 technick\u00E1 univerzita v Bratislave" . "The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films"@en . "The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films"@en . . "372291" . "The influence of the deposition process onto the structural and electrical properties of ZnO:Al thin films" . "3"^^ . . "23640" . "Vliv procesu depozice na strukturn\u00ED a elektrick\u00E9 vlastnosti tenk\u00FDch vrstev oxidu zinku dopovan\u00E9ho hlin\u00EDkem"@cs . . "Bratislava" . "We focused our experiment on the aluminium-doped zinc oxide thin films prepared by RF sputtering onto the glass substrate. ZnO is one of the metal oxide semiconductors suitable for use in photovoltaic as the top electrode or back reflector in thin film solar cells, where it\u00B4s optical and electrical properties, such as low resistivity and high transparency are very important. Therefore all above the ingluence of deposition process on structure and electrical properties was investigated." . "ZnO:Al; RF sputtering; resistivity; transparency; thin films"@en . . "RIV/49777513:23640/08:00500494!RIV09-MSM-23640___" . "978-80-227-2902-4" . "RIV/49777513:23640/08:00500494" . . "[3F0711591DBC]" . "Pru\u0161\u00E1kov\u00E1, Lucie" . . . . "\u0160utta, Pavol" . . "Vliv procesu depozice na strukturn\u00ED a elektrick\u00E9 vlastnosti tenk\u00FDch vrstev oxidu zinku dopovan\u00E9ho hlin\u00EDkem"@cs . "4"^^ . "Liptovsk\u00FD J\u00E1n" . . "V na\u0161em experimentu jsme se zam\u011B\u0159ili na vrstvy oxidu zinku dopovan\u00E9ho hlin\u00EDkem vytv\u00E1\u0159en\u00E9 RF napra\u0161ov\u00E1n\u00EDm na sklen\u011Bn\u00FD substr\u00E1t. Oxid zinku je jedn\u00EDm z polovodi\u010D\u016F vhodn\u00FDch k pou\u017Eit\u00ED ve fotovoltaice k vytvo\u0159en\u00ED vrchn\u00ED elektrody \u010Di zadn\u00EDho reflektoru sol\u00E1rn\u00EDch \u010Dl\u00E1nk\u016F. Optick\u00E9 a elektrick\u00E9 vlastnosti jako n\u00EDzk\u00E1 rezistivita a vysok\u00E1 propustnost jsou pro tyto aplikace d\u016Fle\u017Eit\u00FDmi vlastnostmi tohoto materi\u00E1lu. Proto byl studov\u00E1n vliv depozi\u010Dn\u00EDho procesu na strukturn\u00ED a elektrick\u00E9 vlastnosti vytv\u00E1\u0159en\u00FDch vrstev."@cs . . . "P(1M06031)" . . "Netrvalov\u00E1, Marie" . . "We focused our experiment on the aluminium-doped zinc oxide thin films prepared by RF sputtering onto the glass substrate. ZnO is one of the metal oxide semiconductors suitable for use in photovoltaic as the top electrode or back reflector in thin film solar cells, where it\u00B4s optical and electrical properties, such as low resistivity and high transparency are very important. Therefore all above the ingluence of deposition process on structure and electrical properties was investigated."@en .