"Comparison of various experimental techniques for the determination of microstructure of a-Si:H deposited with different hydrogen dilution"@en . . "2"^^ . "Comparison of various experimental techniques for the determination of microstructure of a-Si:H deposited with different hydrogen dilution" . . . "Srn\u00E1nek, Rudolf" . "P(1M06031)" . . "Vavru\u0148kov\u00E1, Veronika" . . . . "23640" . . "Porovn\u00E1n\u00ED experiment\u00E1ln\u00EDch technik p\u0159i ur\u010Dov\u00E1n\u00ED mikrostruktury a-Si:H deponovan\u00E9ho s r\u016Fzn\u00FDm vod\u00EDkov\u00FDm z\u0159ed\u011Bn\u00EDm"@cs . "360710" . . . "Porovn\u00E1n\u00ED experiment\u00E1ln\u00EDch technik p\u0159i ur\u010Dov\u00E1n\u00ED mikrostruktury a-Si:H deponovan\u00E9ho s r\u016Fzn\u00FDm vod\u00EDkov\u00FDm z\u0159ed\u011Bn\u00EDm"@cs . "Comparison of various experimental techniques for the determination of microstructure of a-Si:H deposited with different hydrogen dilution" . . "2008-06-27+02:00"^^ . "Liptovsk\u00FD J\u00E1n" . "RIV/49777513:23640/08:00500443" . . "Comparison of various experimental techniques for the determination of microstructure of a-Si:H deposited with different hydrogen dilution"@en . "Proceedings of the 14th international conference on Applied physics of condensed matter" . "Bratislava" . . "M\u00FCllerov\u00E1, Jarmila" . "[B62C53D90847]" . "4"^^ . . . "Polykrystalick\u00FD a amorfn\u00ED hydrogenizovan\u00FD k\u0159em\u00EDk (a-Si:H)jsou v\u00FDznamn\u00E9 materi\u00E1ly pro mikroelektroniku, optoelektroniku a fotovoltaiku. Tenk\u00E9 vrstvy p\u0159ipraven\u00E9 PECVD depozic\u00ED ze silanu z\u0159ed\u011Bn\u00E9ho vod\u00EDkem jsou charakteristick\u00E9 lep\u0161\u00ED odolnost\u00ED proti sv\u011Btlem indukovan\u00E9 degradaci sol\u00E1rn\u00EDch \u010Dl\u00E1nk\u016F na b\u00E1zi a-Si:H. Parametry sol\u00E1rn\u00EDch \u010Dl\u00E1nk\u016F v\u00FDznamn\u011B z\u00E1vis\u00ED na elektrick\u00FDch a optick\u00FDch vlastnostech materi\u00E1l\u016F, kter\u00E9 vy\u017Eaduj\u00ED ur\u010Ditou mikrostrukturu. Struktura tzv. protokrystalick\u00FD k\u0159em\u00EDk deponovan\u00E1 p\u0159i specifick\u00FDch podm\u00EDnk\u00E1ch p\u0159edstavuje v\u00FDvoj od amorfn\u00ED k mikrokrystalick\u00E9 f\u00E1zi a obsahuje amorfn\u00ED f\u00E1zi s oblastmi uspo\u0159\u00E1dan\u00FDmi na kr\u00E1tkou vzd\u00E1lenost. V tomto \u010Dl\u00E1nku je vy\u0161et\u0159ov\u00E1n vliv z\u0159ed\u011Bn\u00ED na mikrostrukturn\u00ED vlastnosti. Pro tento \u00FA\u010Del byla pou\u017Eita rtg anal\u00FDza, Ramanova spektroskopie a FTIR spektrometrie."@cs . "Slovensk\u00E1 technick\u00E1 univerzita v Bratislave" . "\u0160utta, Pavol" . "Hydrogenated amorphous silicon (a-Si:H) and polycrystalline hydrogenated silicon are significant materials for thin film microelectronics, optoelectronics and photovoltaics. Thin films prepared from silane diluted with hydrogen in PECVD are characterized by suppressed light-induced degradation of a-Si:H solar cells. Parameters of solar cells critically depend on electronic and optical properties of the material, which require certain microstructure. The structure (so called %22protocrystalline silicon%22), deposited in specific conditions presents evolvement from the amorphous to microcrystalline phase, and includes amorphous phase with the short-range order. In this paper, the influence of dilution on microstructural properties is investigated. For this purpose XRD analysis, Raman and FTIR spectrometry give valuable insights into the structural evolution of films." . . "4"^^ . "978-80-227-2902-4" . "RIV/49777513:23640/08:00500443!RIV09-MSM-23640___" . . "a-Si:H; XRD analysis, Raman spectroscopy; FTIR spectrometry"@en . . "Hydrogenated amorphous silicon (a-Si:H) and polycrystalline hydrogenated silicon are significant materials for thin film microelectronics, optoelectronics and photovoltaics. Thin films prepared from silane diluted with hydrogen in PECVD are characterized by suppressed light-induced degradation of a-Si:H solar cells. Parameters of solar cells critically depend on electronic and optical properties of the material, which require certain microstructure. The structure (so called %22protocrystalline silicon%22), deposited in specific conditions presents evolvement from the amorphous to microcrystalline phase, and includes amorphous phase with the short-range order. In this paper, the influence of dilution on microstructural properties is investigated. For this purpose XRD analysis, Raman and FTIR spectrometry give valuable insights into the structural evolution of films."@en .