"Vavru\u0148kov\u00E1, Veronika" . . . "\u0160utta, Pavol" . . . "Microstructure related characterization of a-Si:H thin films PECVD deposited under varied hydrogen dilution" . "a-Si:H; XRD analysis; optical properties"@en . "P(1M06031)" . . "We report on the structure and optical properties of hydrogenated silicon thin films deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen in a wide dilution range. The samples deposited with dilutions below 30 were detected as amorphous hydrogenated silicon (a-Si:H) with crystalline grains of several nanometers in size which represent the medium-range order of a-Si:H. The optical characterization confirmed increasing ordering with the increasing dilution. The optical band gap was observed to be increasing function of the dilution." . . . "3" . "1336-1376" . "23640" . "433798" . "RIV/49777513:23640/07:00501167!RIV10-MSM-23640___" . "We report on the structure and optical properties of hydrogenated silicon thin films deposited by plasma - enhanced chemical vapor deposition (PECVD) from silane diluted with hydrogen in a wide dilution range. The samples deposited with dilutions below 30 were detected as amorphous hydrogenated silicon (a-Si:H) with crystalline grains of several nanometers in size which represent the medium-range order of a-Si:H. The optical characterization confirmed increasing ordering with the increasing dilution. The optical band gap was observed to be increasing function of the dilution."@en . . . "Advances in Electrical and Electronic Engineering" . . "2"^^ . . "Microstructure related characterization of a-Si:H thin films PECVD deposited under varied hydrogen dilution" . "Microstructure related characterization of a-Si:H thin films PECVD deposited under varied hydrogen dilution"@en . "3"^^ . "RIV/49777513:23640/07:00501167" . "6" . . . "Microstructure related characterization of a-Si:H thin films PECVD deposited under varied hydrogen dilution"@en . "SK - Slovensk\u00E1 republika" . . "4"^^ . . "[21F75584495E]" . . "M\u00FCllerov\u00E1, Jarmila" .